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In: Journal of Microelectromechanical Systems, Jg. 26 (2018-12-01), Heft 12, S. 1023-1034Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 20 (2011-10-01), Heft 5, S. 1192-1200Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 15 (2006-12-01), Heft 6, S. 1766-1776Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 15 (2006-12-01), Heft 6, S. 1708-1714Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 21 (2012-06-01), Heft 3, S. 621-634Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 24 (2015-10-01), Heft 5, S. 1211-1244Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 24 (2015-08-01), Heft 4, S. 904-913Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 23 (2014-06-01), Heft 3, S. 727-739Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 30 (2021-04-01), Heft 2, S. 253-261Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 15 (2006-12-01), Heft 6, S. 1687-1697Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 13 (2004-04-01), Heft 2, S. 300-309Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 24 (2015-02-01), Heft 1, S. 19-28Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 22 (2013-06-01), Heft 3, S. 670-677Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 21 (2012-08-01), Heft 4, S. 867-874Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 20 (2011-10-01), Heft 5, S. 1150-1162Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 20 (2011-04-01), Heft 2, S. 451-459Online academicJournalZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 23 (2014-10-01), Heft 5, S. 1009-1011Online academicJournalZugriff: