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Schlagwort
- capacitive discharge 2 Treffer
- decharge capacitive 2 Treffer
- descarga capacitiva 2 Treffer
- domaines classiques de la physique (y compris les applications) 2 Treffer
- etude experimentale 2 Treffer
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45 weitere Werte:
- experimental study 2 Treffer
- fundamental areas of phenomenology (including applications) 2 Treffer
- krcl 2 Treffer
- radiation sources 2 Treffer
- rayonnement uv 2 Treffer
- source rayonnement 2 Treffer
- ultraviolet radiation 2 Treffer
- xecl 2 Treffer
- active control 1 Treffer
- alta frecuencia 1 Treffer
- applications biologiques et medicales 1 Treffer
- applications industrielles 1 Treffer
- basse pression 1 Treffer
- biological and medical applications 1 Treffer
- computerized simulation 1 Treffer
- contamination 1 Treffer
- control activo 1 Treffer
- controle actif 1 Treffer
- critical size 1 Treffer
- decharge luminescente 1 Treffer
- decharges electriques 1 Treffer
- discharges for spectral sources (including inductively coupled plasma) 1 Treffer
- discharges for spectral sources (including inductively coupled plasmas) 1 Treffer
- duree vie 1 Treffer
- electric discharges 1 Treffer
- erreur mesure 1 Treffer
- excimer lamp 1 Treffer
- experimental result 1 Treffer
- extreme ultraviolet radiation 1 Treffer
- general 1 Treffer
- generalites 1 Treffer
- glow discharges 1 Treffer
- haute frequence 1 Treffer
- high frequency 1 Treffer
- industrial applications 1 Treffer
- instruments, apparatus, components and techniques common to several branches of physics and astronomy 1 Treffer
- instruments, appareillage, composants et techniques communs a plusieurs branches de la physique et de l'astronomie 1 Treffer
- iode molecule 1 Treffer
- iodine molecules 1 Treffer
- krypton chlorides 1 Treffer
- krypton chlorure 1 Treffer
- lifetime 1 Treffer
- low pressure 1 Treffer
- measurement errors 1 Treffer
- methodes utilisant des decharges pour sources spectrales (incluant les plasmas couples inductivement) 1 Treffer
Publikation
- spie proceedings series 3 Treffer
- laser applications in microelectronic and optoelectronic manufacturing v (san jose ca, 24-26 january 2000) 1 Treffer
- metrology, inspection, and process control for microlithography xv (santa clara ca, 26 february - 1 march 2001 ) 1 Treffer
- photon processing in microelectronics and photonics (san jose ca, 21-24 january 2002) 1 Treffer
Sprache
3 Treffer
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In: Photon processing in microelectronics and photonics (San Jose CA, 21-24 January 2002), 2002, S. 419-430KonferenzZugriff:
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In: Laser applications in microelectronic and optoelectronic manufacturing V (San Jose CA, 24-26 January 2000), 2000, S. 425-431KonferenzZugriff:
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In: Metrology, inspection, and process control for microlithography XV (Santa Clara CA, 26 February - 1 March 2001 ), 2001, S. 835-843KonferenzZugriff: