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- chemical vapor deposition 8 Treffer
- step coverage 3 Treffer
- passivation film 2 Treffer
- arrhenius plot 1 Treffer
- chemical equilibrium 1 Treffer
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38 weitere Werte:
- chemical vapor deposition process 1 Treffer
- collision cross section 1 Treffer
- compound semiconductor 1 Treffer
- control chart 1 Treffer
- critical nucleus 1 Treffer
- debye length 1 Treffer
- dielectric film 1 Treffer
- direct writing 1 Treffer
- electron beam current density 1 Treffer
- electron cyclotron resonance 1 Treffer
- electron cyclotron resonance heating 1 Treffer
- electron cyclotron resonance plasma 1 Treffer
- elementary reaction 1 Treffer
- epitaxial growth 1 Treffer
- film growth 1 Treffer
- film property 1 Treffer
- film stress 1 Treffer
- fluid element 1 Treffer
- free energy change 1 Treffer
- gate oxide 1 Treffer
- glow discharge 1 Treffer
- hydrogen reduction 1 Treffer
- knudsen number 1 Treffer
- liquid phase epitaxy 1 Treffer
- material research society 1 Treffer
- mercury vapor 1 Treffer
- mercury vapor lamp 1 Treffer
- microelectronic industry 1 Treffer
- microwave discharge 1 Treffer
- nitride film 1 Treffer
- physical vapor deposition 1 Treffer
- plasma chemistry 1 Treffer
- reactor design 1 Treffer
- residence time distribution 1 Treffer
- silicon nitride 1 Treffer
- surface free energy 1 Treffer
- tungsten deposition 1 Treffer
- very large scale integrate 1 Treffer
11 Treffer
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 163-203Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 266-272Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 227-265Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 204-226Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 94-118Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 119-143Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 62-93Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 144-162Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 41-61Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 1-7Online E-BookZugriff:
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In: Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials; (1995) S. 8-40Online E-BookZugriff: