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- fundamental areas of phenomenology (including applications) 2 Treffer
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Publikation
- spie proceedings series 3 Treffer
- laser applications in microelectronic and optoelectronic manufacturing v (san jose ca, 24-26 january 2000) 1 Treffer
- metrology, inspection, and process control for microlithography xv (santa clara ca, 26 february - 1 march 2001 ) 1 Treffer
- photon processing in microelectronics and photonics (san jose ca, 21-24 january 2002) 1 Treffer
- proceedings- spie the international society for optical engineering 1 Treffer
4 Treffer
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In: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, , Heft E 3092, S. 289-292KonferenzZugriff:
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In: Photon processing in microelectronics and photonics (San Jose CA, 21-24 January 2002), 2002, S. 419-430KonferenzZugriff:
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In: Laser applications in microelectronic and optoelectronic manufacturing V (San Jose CA, 24-26 January 2000), 2000, S. 425-431KonferenzZugriff:
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In: Metrology, inspection, and process control for microlithography XV (Santa Clara CA, 26 February - 1 March 2001 ), 2001, S. 835-843KonferenzZugriff: