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Schlagwort
- [phys]physics [physics] 122 Treffer
- [phys.cond.cm-ms]physics [physics]/condensed matter [cond-mat]/materials science [cond-mat.mtrl-sci] 106 Treffer
- [spi.nano]engineering sciences [physics]/micro and nanotechnologies/microelectronics 94 Treffer
- [spi.mat]engineering sciences [physics]/materials 46 Treffer
- [phys.phys.phys-optics]physics [physics]/physics [physics]/optics [physics.optics] 45 Treffer
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45 weitere Werte:
- [spi.opti]engineering sciences [physics]/optics / photonic 41 Treffer
- [spi]engineering sciences [physics] 35 Treffer
- silicon 33 Treffer
- [phys.cond]physics [physics]/condensed matter [cond-mat] 30 Treffer
- [spi.nrj]engineering sciences [physics]/electric power 30 Treffer
- thin films 28 Treffer
- plasma etching 25 Treffer
- atomic layer deposition 24 Treffer
- capacitors 21 Treffer
- [chim.mate]chemical sciences/material chemistry 18 Treffer
- lithography 18 Treffer
- [spi.elec]engineering sciences [physics]/electromagnetism 17 Treffer
- etching 16 Treffer
- [phys.phys.phys-plasm-ph]physics [physics]/physics [physics]/plasma physics [physics.plasm-ph] 15 Treffer
- chemical vapor deposition 13 Treffer
- electrodes 13 Treffer
- photoresists 13 Treffer
- plasma gases 13 Treffer
- x-ray photoelectron spectroscopy 13 Treffer
- chlorine 12 Treffer
- quantum wells 12 Treffer
- atomic force microscopy 11 Treffer
- random access memory 11 Treffer
- transmission electron microscopy 11 Treffer
- dielectrics 10 Treffer
- plasma chemistry 10 Treffer
- surface roughness 10 Treffer
- titanium nitride 10 Treffer
- dielectric devices 9 Treffer
- electric capacity 9 Treffer
- nanowires 9 Treffer
- oxygen 9 Treffer
- strains & stresses (mechanics) 9 Treffer
- complementary metal oxide semiconductors 8 Treffer
- electric fields 8 Treffer
- electromagnetic fields 8 Treffer
- graphene 8 Treffer
- molecular dynamics 8 Treffer
- oxide 8 Treffer
- spectrum analysis 8 Treffer
- [phys.phys.phys-comp-ph]physics [physics]/physics [physics]/computational physics [physics.comp-ph] 7 Treffer
- [spi.tron]engineering sciences [physics]/electronics 7 Treffer
- barium compounds 7 Treffer
- cathodoluminescence 7 Treffer
- hafnium compounds 7 Treffer
Publikation
- issn: 0003-6951 283 Treffer
- issn: 0021-8979 261 Treffer
- applied physics letters 83 Treffer
- journal of applied physics 82 Treffer
- journal of vacuum science & technology: part b-nanotechnology & microelectronics 32 Treffer
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12 weitere Werte:
- journal of vacuum science & technology: part a-vacuums, surfaces & films 28 Treffer
- journal of vacuum science & technology: part b-microelectronics & nanometer structures 22 Treffer
- aip conference proceedings 13 Treffer
- issn: 0094-243x 8 Treffer
- journal of chemical physics 8 Treffer
- issn: 0034-6748 7 Treffer
- review of scientific instruments 7 Treffer
- journal of the acoustical society of america 5 Treffer
- aip advances 4 Treffer
- biomicrofluidics 3 Treffer
- issn: 1932-1058 3 Treffer
- hyper article en ligne - sciences de l'homme et de la societe 1 Treffer
Sprache
853 Treffer
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In: Applied Physics Letters, Jg. 124 (2024-02-26), Heft 9, S. 1-5Online academicJournalZugriff:
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In: Journal of Chemical Physics, Jg. 117 (2002-09-08), Heft 10, S. 4961-4972Online academicJournalZugriff:
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In: Journal of the Acoustical Society of America, Jg. 140 (2016-08-01), Heft 2, S. 1154-1161academicJournalZugriff:
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In: AIP Conference Proceedings, Jg. 832 (2006-05-05), Heft 1, S. 11-20KonferenzZugriff:
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In: AIP Conference Proceedings, Jg. 1953 (2018-04-12), Heft 1, S. N.PAG- (4S.)KonferenzZugriff:
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In: Journal of Chemical Physics, Jg. 114 (2001-06-01), Heft 21Online academicJournalZugriff:
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In: Journal of Chemical Physics, Jg. 114 (2001-04-01), Heft 13Online academicJournalZugriff:
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In: ISSN: 0003-6951, 2022Online academicJournalZugriff:
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In: Review of Scientific Instruments, Jg. 78 (2007-08-01), Heft 8, S. 85110-85119Online academicJournalZugriff:
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In: ISSN: 0021-8979, 2021Online academicJournalZugriff:
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In: ISSN: 0021-8979, 2020Online academicJournalZugriff:
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In: ISSN: 0021-8979, 2023Online academicJournalZugriff:
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In: ISSN: 0003-6951, 2023academicJournalZugriff:
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In: Journal of the Acoustical Society of America, Jg. 79 (1986-05-02), Heft S1, S. S65- (2S.)academicJournalZugriff:
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In: Journal of Chemical Physics, Jg. 113 (2000-10-22), Heft 16Online academicJournalZugriff:
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In: ISSN: 0021-8979, 2019Online academicJournalZugriff:
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In: ISSN: 0003-6951, 2019Online academicJournalZugriff:
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In: ISSN: 0034-6748, 2019Online academicJournalZugriff:
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In: ISSN: 0003-6951, 2019Online academicJournalZugriff:
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In: ISSN: 0021-8979, 2018Online academicJournalZugriff: