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- manufacturing processes 9 Treffer
- semiconductor manufacturing 8 Treffer
- semiconductor wafers 8 Treffer
- virtual metrology (vm) 8 Treffer
- accuracy 4 Treffer
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41 weitere Werte:
- algorithms 4 Treffer
- artificial neural networks 4 Treffer
- automation 4 Treffer
- chemical vapor deposition 4 Treffer
- computer integrated manufacturing systems 4 Treffer
- data modeling 4 Treffer
- data models 4 Treffer
- global similarity index (gsi) 4 Treffer
- information display systems 4 Treffer
- liquid crystal displays 4 Treffer
- metrology 4 Treffer
- motion control devices 4 Treffer
- neural networks (nns) 4 Treffer
- plasma diffusion 4 Treffer
- prediction model 4 Treffer
- prediction models 4 Treffer
- process control systems 4 Treffer
- production control 4 Treffer
- quality control 4 Treffer
- real time systems 4 Treffer
- real-time control 4 Treffer
- servers 4 Treffer
- sputtering (physics) 4 Treffer
- tuning 4 Treffer
- virtual metrology 4 Treffer
- automatic virtual metrology (avm) 2 Treffer
- air pollution 1 Treffer
- chemicals 1 Treffer
- communication, networking and broadcast technologies 1 Treffer
- components, circuits, devices and systems 1 Treffer
- computing and processing 1 Treffer
- discharges 1 Treffer
- emission factor 1 Treffer
- engineered materials, dielectrics and plasmas 1 Treffer
- industries 1 Treffer
- mass balance 1 Treffer
- photovoltaic industry 1 Treffer
- power, energy and industry applications 1 Treffer
- signal processing and analysis 1 Treffer
- volatile organic compounds (vocs) 1 Treffer
- wastewater 1 Treffer
Publikation
- ieee transactions on semiconductor manufacturing 12 Treffer
- ieee transactions on automation science & engineering 4 Treffer
- 2011 international conference on consumer electronics, communications and networks (cecnet), consumer electronics, communications and networks (cecnet), 2011 international conference on 1 Treffer
Sprache
5 Treffer
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In: 2011 International Conference on Consumer Electronics, Communications and Networks (CECNet), 2011-04-01, S. 1206-1211KonferenzZugriff:
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 19 (2006-05-01), Heft 2, S. 183-194Online academicJournalZugriff:
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 21 (2008-08-01), Heft 3, S. 426-434Online academicJournalZugriff:
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 20 (2007-11-01), Heft 4, S. 566-571Online academicJournalZugriff:
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In: IEEE Transactions on Automation Science & Engineering, Jg. 9 (2012), Heft 1, S. 181-188Online academicJournalZugriff: