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- bioengineering 2 Treffer
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33 weitere Werte:
- engineered materials, dielectrics and plasmas 2 Treffer
- power, energy and industry applications 2 Treffer
- aerospace 1 Treffer
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- cobalt 1 Treffer
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- ellipsometry 1 Treffer
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- general topics for engineers 1 Treffer
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- refractive index 1 Treffer
- reliability 1 Treffer
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- robotics and control systems 1 Treffer
- solids 1 Treffer
- spr 1 Treffer
- surface treatment 1 Treffer
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- thickness 1 Treffer
- thickness measurement 1 Treffer
- thin film deposition 1 Treffer
Publikation
- 2013 international conference on manipulation, manufacturing and measurement on the nanoscale, manipulation, manufacturing and measurement on the nanoscale (3m-nano), 2013 international conference on 1 Treffer
- 2017 ieee electron devices technology and manufacturing conference (edtm), electron devices technology and manufacturing conference (edtm), 2017 ieee 1 Treffer
- 2018 ieee international interconnect technology conference (iitc), interconnect technology conference (iitc), 2018 ieee international 1 Treffer
3 Treffer
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In: 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM), 2017-02-01, S. 59-60KonferenzZugriff:
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In: 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 2013-08-01, S. 259-263KonferenzZugriff:
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Modified ALD TaN Barrier with Ru Liner and Dynamic Cu Reflow for 36nm Pitch Interconnect IntegrationIn: 2018 IEEE International Interconnect Technology Conference (IITC), 2018-06-01, S. 43-45KonferenzZugriff: