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Weniger Treffer
Gefunden in
Art der Quelle
Schlagwort
- plasma applications 16 Treffer
- plasma chemistry 14 Treffer
- silicon 14 Treffer
- fabrication 13 Treffer
- photonics and electrooptics 11 Treffer
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45 weitere Werte:
- chemical technology 9 Treffer
- dielectrics 7 Treffer
- electrodes 7 Treffer
- fields, waves and electromagnetics 7 Treffer
- lithography 7 Treffer
- metallization 7 Treffer
- computing and processing 6 Treffer
- copper 6 Treffer
- semiconductor films 6 Treffer
- temperature 6 Treffer
- chemical processes 5 Treffer
- plasma materials processing 5 Treffer
- resists 5 Treffer
- substrates 5 Treffer
- testing 5 Treffer
- carbon nanotubes 4 Treffer
- cleaning 4 Treffer
- costs 4 Treffer
- cvd 4 Treffer
- dielectric materials 4 Treffer
- filling 4 Treffer
- gases 4 Treffer
- glass 4 Treffer
- inductors 4 Treffer
- isolation technology 4 Treffer
- planarization 4 Treffer
- plasma properties 4 Treffer
- power, energy and industry applications 4 Treffer
- scanning electron microscopy 4 Treffer
- signal processing and analysis 4 Treffer
- tungsten 4 Treffer
- ultra large scale integration 4 Treffer
- voltage 4 Treffer
- aluminum 3 Treffer
- electronics industry 3 Treffer
- fets 3 Treffer
- global warming 3 Treffer
- hydrogen 3 Treffer
- inorganic materials 3 Treffer
- insulation 3 Treffer
- iron 3 Treffer
- manufacturing processes 3 Treffer
- micromechanical devices 3 Treffer
- moon 3 Treffer
- noise measurement 3 Treffer
Verlag
Publikation
- ieee electron device letters, electron device letters, ieee, ieee electron device lett. 6 Treffer
- ieee transactions on semiconductor manufacturing, semiconductor manufacturing, ieee transactions on, ieee trans. semicond. manufact. 3 Treffer
- journal of microelectromechanical systems, microelectromechanical systems, journal of, j. microelectromech. syst. 3 Treffer
- 2009 22nd international vacuum nanoelectronics conference, vacuum nanoelectronics conference, 2009. ivnc 2009. 22nd international 2 Treffer
- ieee transactions on electron devices, electron devices, ieee transactions on, ieee trans. electron devices 2 Treffer
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44 weitere Werte:
- international symposium on semiconductor manufacturing, extended abstracts of issm, semiconductor manufacturing, 1994. extended abstracts of issm '94. 1994 international symposium on 2 Treffer
- proceedings of the ieee 1999 international interconnect technology conference (cat. no.99ex247), interconnect technology, 1999. ieee international conference, interconnect technology 2 Treffer
- proceedings of the ieee 2001 international interconnect technology conference (cat. no.01ex461), interconnect technology conference, 2001. proceedings of the ieee 2001 international, interconnect technology conference 2 Treffer
- technical digest., international electron devices meeting, electron devices meeting, 1988. iedm '88. technical digest., international 2 Treffer
- twenty fourth ieee/cpmt international electronics manufacturing technology symposium (cat. no.99ch36330), electronics manufacturing technology symposium, 1999. twenty-fourth ieee/cpmt, electronics manufacturing technology 2 Treffer
- 1973 international electron devices meeting, electron devices meeting, 1973 international, iedm tech. dig. 1 Treffer
- 1981 symposium on vlsi technology. digest of technical papers, vlsi technology, 1981. digest of technical papers. symposium on 1 Treffer
- 1991 proceedings eighth international ieee vlsi multilevel interconnection conference, vlsi multilevel interconnection conference, 1991, proceedings., eighth international ieee 1 Treffer
- 1998 5th international conference on solid-state and integrated circuit technology. proceedings (cat. no.98ex105), solid-state and integrated circuit technology, 1998. proceedings. 1998 5th international conference on, solid-state and integrated circuit technology 1 Treffer
- 1998 international conference on ion implantation technology. proceedings (cat. no.98ex144), ion implantation technology proceedings, 1998 international conference on, ion implantation technology 1 Treffer
- 2001 ieee international symposium on semiconductor manufacturing. issm 2001. conference proceedings (cat. no.01ch37203), semiconductor manufacturing symposium, 2001 ieee international, semiconductor manufacturing 1 Treffer
- 2002 international microprocesses and nanotechnology conference, 2002. digest of papers., microprocesses and nanotechnology conference, 2002. digest of papers. microprocesses and nanotechnology 2002. 2002 international, microprocesses and nanotechnology 1 Treffer
- 2004 ieee/semi advanced semiconductor manufacturing conference and workshop (ieee cat. no.04ch37530), advanced semiconductor manufacturing, 2004. asmc '04. ieee conference and workshop, advanced semiconductor manufacturing 1 Treffer
- 2006 1st ieee international conference on nano/micro engineered and molecular systems, nano/micro engineered and molecular systems, 2006. nems '06. 1st ieee international conference on 1 Treffer
- 2006 international sige technology and device meeting, sige technology and device meeting, 2006. istdm 2006. third international 1 Treffer
- 2007 ieee symposium on vlsi technology, vlsi technology, 2007 ieee symposium on 1 Treffer
- 2008 ieee international electron devices meeting, electron devices meeting, 2008. iedm 2008. ieee international 1 Treffer
- 2008 ieee international vacuum electronics conference, vacuum electronics conference, 2008. ivec 2008. ieee international 1 Treffer
- 2009 34th ieee photovoltaic specialists conference (pvsc), photovoltaic specialists conference (pvsc), 2009 34th ieee 1 Treffer
- 2010 ieee international interconnect technology conference, interconnect technology conference (iitc), 2010 international 1 Treffer
- 2016 ieee 66th electronic components and technology conference (ectc), electronic components and technology conference (ectc), 2016 ieee 66th 1 Treffer
- 5th ieee conference on nanotechnology, 2005., nanotechnology, 2005. 5th ieee conference on, nanotechnology 1 Treffer
- 9th international vacuum microelectronics conference, vacuum microelectronics conference, 1996. ivmc'96., 9th international, vacuum microelectronics 1 Treffer
- advanced semiconductor manufacturing conference and workshop, 2003 ieeei/semi, advanced semiconductor manufacturing 1 Treffer
- digest of papers. 2004 international microprocesses and nanotechnology conference, 2004., microprocesses and nanotechnology conference, 2004. digest of papers. 2004 international 1 Treffer
- digest of papers. microprocesses and nanotechnology 2001. 2001 international microprocesses and nanotechnology conference (ieee cat. no.01ex468), microprocesses and nanotechnology conference, 2001 international, microprocesses and nanotechnology 1 Treffer
- essderc '87: 17th european solid state device research conference, solid state device research conference, 1987. essderc '87. 17th european 1 Treffer
- ieee conference record - abstracts. 1999 ieee international conference on plasma science. 26th ieee international conference (cat. no.99ch36297), plasma science, 1999. icops '99. ieee conference record - abstracts. 1999 ieee international conference on, plasma science 1 Treffer
- ieee international symposium on electronics and the environment, 2003., electronics and the environment, 2003. ieee international symposium on, electronics and the environment 1 Treffer
- ieee transactions on device and materials reliability, device and materials reliability, ieee transactions on, ieee trans. device mater. relib. 1 Treffer
- ieee transactions on nanotechnology, nanotechnology, ieee transactions on, ieee trans. nanotechnology 1 Treffer
- international conference on indium phosphide and related materials, indium phosphide and related materials, 1990. second international conference. 1 Treffer
- international electron devices meeting 1991 [technical digest], electron devices meeting, 1991. iedm '91. technical digest., international 1 Treffer
- international electron devices meeting. technical digest, electron devices meeting, 1996. iedm '96., international, electron devices 1 Treffer
- international semiconductor device research symposium, 2003, semiconductor device research symposium, 2003 international, semiconductor device research 1 Treffer
- international technical digest on electron devices meeting, electron devices meeting, 1989. iedm '89. technical digest., international 1 Treffer
- international technical digest on electron devices, electron devices meeting, 1990. iedm '90. technical digest., international 1 Treffer
- proceedings of ieee conference on electrical insulation and dielectric phenomena - (ceidp '93), electrical insulation and dielectric phenomena, 1993. annual report., conference on, electrical insulation and dielectric phenomena 1 Treffer
- proceedings of the 2006 ieee international symposium on electronics and the environment, 2006., electronics and the environment, 2006. proceedings of the 2006 ieee international symposium on 1 Treffer
- proceedings of the ieee 2003 international interconnect technology conference (cat. no.03th8695), interconnect technology conference, 2003. proceedings of the ieee 2003 international, interconnect technology 1 Treffer
- quantum electronics and laser science conference (qels 2000). technical digest. postconference edition. tops vol.40 (ieee cat. no.00ch37089), quantum electronics and laser science conference, 2000. (qels 2000). technical digest, quantum electronics and laser science 1 Treffer
- seventh international ieee conference on vlsi multilevel interconnection, vlsi multilevel interconnection conference, 1990. proceedings., seventh international ieee 1 Treffer
- the 8th annual ieee international conference on nano/micro engineered and molecular systems, nano/micro engineered and molecular systems (nems), 2013 8th ieee international conference on 1 Treffer
- the sixteenth annual international conference on micro electro mechanical systems, 2003. mems-03 kyoto. ieee, micro electro mechanical systems, 2003. mems-03 kyoto. ieee the sixteenth annual international conference on, micro electro mechanical systems 1 Treffer
65 Treffer
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 17 (2004-11-01), Heft 4, S. 491-496Online academicJournalZugriff:
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In: 2007 IEEE Symposium on VLSI Technology, 2007-06-01, S. 102KonferenzZugriff:
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In: Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI, 2003, S. 125-130KonferenzZugriff:
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In: 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203), 2001, S. 117-120KonferenzZugriff:
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In: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530), 2004, S. 433-436KonferenzZugriff:
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In: 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105), 1998, S. 135-138KonferenzZugriff:
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In: 2009 34th IEEE Photovoltaic Specialists Conference (PVSC), 2009-06-01, S. 000175KonferenzZugriff:
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In: International Technical Digest on Electron Devices, 1990, S. 39-42KonferenzZugriff:
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In: Proceedings of IEEE Conference on Electrical Insulation and Dielectric Phenomena - (CEIDP '93), 1993, S. 355-360KonferenzZugriff:
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In: Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247), 1999, S. 152-154KonferenzZugriff:
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In: International Conference on Indium Phosphide and Related Materials, 1990, S. 344-347KonferenzZugriff:
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In: IEEE Electron Device Letters, Jg. 25 (2004-06-01), Heft 6, S. 381-383Online academicJournalZugriff:
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In: International Semiconductor Device Research Symposium, 2003, 2003, S. 164-165KonferenzZugriff:
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In: Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference,, 2004, S. 254-255KonferenzZugriff:
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In: IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297), 1999, S. 158-158KonferenzZugriff:
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In: 1981 Symposium on VLSI Technology. Digest of Technical Papers, 1981-09-01, S. 68KonferenzZugriff:
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In: ESSDERC '87: 17th European Solid State Device Research Conference, 1987-09-01, S. 347KonferenzZugriff:
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 17 (2004-11-01), Heft 4, S. 483-490Online academicJournalZugriff:
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In: The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013-04-01, S. 697-700KonferenzZugriff:
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In: IEEE Transactions on Nanotechnology, Jg. 8 (2009-03-01), Heft 2, S. 135-138Online academicJournalZugriff: