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Weniger Treffer
Gefunden in
Art der Quelle
Schlagwort
- plasma applications 71 Treffer
- chemical vapor deposition 60 Treffer
- photonics and electrooptics 59 Treffer
- silicon 56 Treffer
- computing and processing 51 Treffer
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45 weitere Werte:
- fields, waves and electromagnetics 48 Treffer
- signal processing and analysis 41 Treffer
- fabrication 37 Treffer
- power, energy and industry applications 34 Treffer
- substrates 31 Treffer
- plasma chemistry 28 Treffer
- plasma temperature 26 Treffer
- metallization 25 Treffer
- dielectric materials 24 Treffer
- dielectrics 24 Treffer
- resists 24 Treffer
- testing 24 Treffer
- plasma materials processing 23 Treffer
- semiconductor films 23 Treffer
- tungsten 23 Treffer
- temperature 22 Treffer
- copper 21 Treffer
- filling 19 Treffer
- silicon compounds 19 Treffer
- chemical technology 18 Treffer
- lithography 18 Treffer
- nuclear engineering 17 Treffer
- cleaning 15 Treffer
- cmos technology 15 Treffer
- oxidation 15 Treffer
- tin 15 Treffer
- bioengineering 14 Treffer
- conductivity 14 Treffer
- electrodes 14 Treffer
- hydrogen 14 Treffer
- inductors 14 Treffer
- leakage current 14 Treffer
- planarization 14 Treffer
- plasma density 14 Treffer
- plasma sources 14 Treffer
- costs 13 Treffer
- isolation technology 13 Treffer
- plasma properties 13 Treffer
- chemical processes 12 Treffer
- degradation 12 Treffer
- integrated circuit interconnections 12 Treffer
- optical films 12 Treffer
- random access memory 12 Treffer
- annealing 11 Treffer
- contact resistance 11 Treffer
Verlag
Publikation
- ieee electron device letters, electron device letters, ieee, ieee electron device lett. 20 Treffer
- ieee transactions on electron devices, electron devices, ieee transactions on, ieee trans. electron devices 8 Treffer
- seventh international ieee conference on vlsi multilevel interconnection, vlsi multilevel interconnection conference, 1990. proceedings., seventh international ieee 7 Treffer
- 1991 proceedings eighth international ieee vlsi multilevel interconnection conference, vlsi multilevel interconnection conference, 1991, proceedings., eighth international ieee 6 Treffer
- journal of microelectromechanical systems, microelectromechanical systems, journal of, j. microelectromech. syst. 6 Treffer
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45 weitere Werte:
- 1988. proceedings., fifth international ieee vlsi multilevel interconnection conference, vlsi multilevel interconnection conference, 1988. proceedings., fifth international ieee 5 Treffer
- proceedings of the ieee 2002 international interconnect technology conference (cat. no.02ex519), interconnect technology conference, 2002. proceedings of the ieee 2002 international, interconnect technology conference 5 Treffer
- proceedings of the ieee 2005 international interconnect technology conference, 2005., interconnect technology conference, 2005. proceedings of the ieee 2005 international, interconnect technology 5 Treffer
- ieee transactions on plasma science, plasma science, ieee transactions on, ieee trans. plasma sci. 4 Treffer
- ieee transactions on semiconductor manufacturing, semiconductor manufacturing, ieee transactions on, ieee trans. semicond. manufact. 4 Treffer
- proceedings of the ieee 2001 international interconnect technology conference (cat. no.01ex461), interconnect technology conference, 2001. proceedings of the ieee 2001 international, interconnect technology conference 4 Treffer
- technical digest., international electron devices meeting, electron devices meeting, 1988. iedm '88. technical digest., international 4 Treffer
- advanced semiconductor manufacturing conference and workshop, 2003 ieeei/semi, advanced semiconductor manufacturing 3 Treffer
- essderc '87: 17th european solid state device research conference, solid state device research conference, 1987. essderc '87. 17th european 3 Treffer
- international electron devices meeting 2000. technical digest. iedm (cat. no.00ch37138), electron devices meeting, 2000. iedm '00. technical digest. international, electron devices meeting 3 Treffer
- international electron devices meeting. technical digest, electron devices meeting, 1996. iedm '96., international, electron devices 3 Treffer
- proceedings of issm2000. ninth international symposium on semiconductor manufacturing (ieee cat. no.00ch37130), semiconductor manufacturing, 2000. proceedings of issm 2000. the ninth international symposium on, semiconductor manufacturing 3 Treffer
- proceedings of the ieee 1998 international interconnect technology conference (cat. no.98ex102), interconnect technology conference, 1998. proceedings of the ieee 1998 international, interconnect technology 3 Treffer
- proceedings of the ieee 1999 international interconnect technology conference (cat. no.99ex247), interconnect technology, 1999. ieee international conference, interconnect technology 3 Treffer
- the 33rd ieee international conference on plasma science, 2006. icops 2006. ieee conference record - abstracts., plasma science, 2006. icops 2006. ieee conference record - abstracts. the 33rd ieee international conference on 3 Treffer
- 13th annual ieee/semi advanced semiconductor manufacturing conference. advancing the science and technology of semiconductor manufacturing. asmc 2002 (cat. no.02ch37259), advanced semiconductor manufacturing 2002 ieee/semi conference and workshop, advanced semiconductor manufacturing 2 Treffer
- 1984 international electron devices meeting, electron devices meeting, 1984 international, iedm tech. dig. 2 Treffer
- 1995 symposium on vlsi technology. digest of technical papers, vlsi technology, 1995. digest of technical papers. 1995 symposium on, vlsi technology 2 Treffer
- 1999 symposium on vlsi technology. digest of technical papers (ieee cat. no.99ch36325), vlsi technology, 1999. digest of technical papers. 1999 symposium on, vlsi technology 2 Treffer
- 2000 5th international symposium on plasma process-induced damage (ieee cat. no.00th8479), plasma process-induced damage, 2000 5th international symposium on, plasma process-induced damage 2 Treffer
- 2001 ieee international symposium on semiconductor manufacturing. issm 2001. conference proceedings (cat. no.01ch37203), semiconductor manufacturing symposium, 2001 ieee international, semiconductor manufacturing 2 Treffer
- 2002 international microprocesses and nanotechnology conference, 2002. digest of papers., microprocesses and nanotechnology conference, 2002. digest of papers. microprocesses and nanotechnology 2002. 2002 international, microprocesses and nanotechnology 2 Treffer
- 2003 symposium on vlsi technology. digest of technical papers (ieee cat. no.03ch37407), vlsi technology, 2003. digest of technical papers. 2003 symposium on, vlsi technology 2 Treffer
- 2004 ieee/semi advanced semiconductor manufacturing conference and workshop (ieee cat. no.04ch37530), advanced semiconductor manufacturing, 2004. asmc '04. ieee conference and workshop, advanced semiconductor manufacturing 2 Treffer
- 2006 19th international vacuum nanoelectronics conference, vacuum nanoelectronics conference, 2006 and the 2006 50th international field emission symposium., ivnc/ifes 2006. technical digest. 19th international 2 Treffer
- 2007 ieee 20th international vacuum nanoelectronics conference, vacuum nanoelectronics conference, 2007. ivnc. ieee 20th international 2 Treffer
- 2007 ieee international interconnect technology conferencee, international interconnect technology conference, ieee 2007 2 Treffer
- 2008 ieee international vacuum electronics conference, vacuum electronics conference, 2008. ivec 2008. ieee international 2 Treffer
- 2009 22nd international vacuum nanoelectronics conference, vacuum nanoelectronics conference, 2009. ivnc 2009. 22nd international 2 Treffer
- 2009 34th ieee photovoltaic specialists conference (pvsc), photovoltaic specialists conference (pvsc), 2009 34th ieee 2 Treffer
- 2015 ieee 42nd photovoltaic specialist conference (pvsc), photovoltaic specialist conference (pvsc), 2015 ieee 42nd 2 Treffer
- 2016 ieee international conference on manipulation, manufacturing and measurement on the nanoscale (3m-nano), manipulation, manufacturing and measurement on the nanoscale (3m-nano), 2016 ieee international conference on 2 Treffer
- 9th international vacuum microelectronics conference, vacuum microelectronics conference, 1996. ivmc'96., 9th international, vacuum microelectronics 2 Treffer
- conference record of the twenty sixth ieee photovoltaic specialists conference - 1997, photovoltaic specialists conference, 1997., conference record of the twenty-sixth ieee, photovoltaic specialists conference 2 Treffer
- essderc '95: proceedings of the 25th european solid state device research conference, solid state device research conference, 1995. essderc '95. proceedings of the 25th european 2 Treffer
- ieee conference record - abstracts. 1999 ieee international conference on plasma science. 26th ieee international conference (cat. no.99ch36297), plasma science, 1999. icops '99. ieee conference record - abstracts. 1999 ieee international conference on, plasma science 2 Treffer
- international electron devices meeting 1998. technical digest (cat. no.98ch36217), electron devices meeting, 1998. iedm '98. technical digest., international, electron devices - iedm 1998 2 Treffer
- international symposium on semiconductor manufacturing, extended abstracts of issm, semiconductor manufacturing, 1994. extended abstracts of issm '94. 1994 international symposium on 2 Treffer
- proceedings of the ieee 2000 international interconnect technology conference (cat. no.00ex407), interconnect technology conference, 2000. proceedings of the ieee 2000 international, interconnect technology 2 Treffer
- proceedings of the ieee 2003 international interconnect technology conference (cat. no.03th8695), interconnect technology conference, 2003. proceedings of the ieee 2003 international, interconnect technology 2 Treffer
- proceedings of the ieee 2004 international interconnect technology conference (ieee cat. no.04th8729), interconnect technology conference, 2004. proceedings of the ieee 2004 international, interconnect technology 2 Treffer
- proceedings., sixth international ieee vlsi multilevel interconnection conference, vlsi multilevel interconnection conference, 1989. proceedings., sixth international ieee 2 Treffer
- twenty fourth ieee/cpmt international electronics manufacturing technology symposium (cat. no.99ch36330), electronics manufacturing technology symposium, 1999. twenty-fourth ieee/cpmt, electronics manufacturing technology 2 Treffer
- [proceedings 1991] third international conference indium phosphide and related materials, indium phosphide and related materials, 1991., third international conference. 1 Treffer
- 10th ieee international conference of advanced thermal processing of semiconductors, advanced thermal processing of semiconductors, 2002. rtp 2002. 10th ieee international conference of, advanced thermal processing of semiconductors 1 Treffer
258 Treffer
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In: IEEE Electron Device Letters, Jg. 39 (2018-09-01), Heft 9, S. 1274-1274Online academicJournalZugriff:
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In: IEEE Transactions on Electron Devices, Jg. 59 (2012-05-01), Heft 5, S. 1445-1453Online academicJournalZugriff:
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In: 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2016-07-01, S. 191-194KonferenzZugriff:
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In: IEEE Transactions on Electron Devices, Jg. 54 (2007-06-01), Heft 6, S. 1566-1570Online academicJournalZugriff:
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In: IEEE Transactions on Plasma Science, Jg. 37 (2009-09-01), Heft 9, S. 1723-1729Online academicJournalZugriff:
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In: 2014 International Symposium on Next-Generation Electronics (ISNE), 2014-05-01, S. 1-2KonferenzZugriff:
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In: IEEE Transactions on Semiconductor Manufacturing, Jg. 17 (2004-11-01), Heft 4, S. 491-496Online academicJournalZugriff:
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In: 2007 IEEE Symposium on VLSI Technology, 2007-06-01, S. 102KonferenzZugriff:
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In: 2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC), 2015-06-01, S. 1-4KonferenzZugriff:
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In: 2014 International Semiconductor Conference (CAS), 2014-10-01, S. 121-124KonferenzZugriff:
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In: 2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC), 2015-06-01, S. 1-3KonferenzZugriff:
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In: Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI, 2003, S. 125-130KonferenzZugriff:
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In: Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference,, 2002, S. 308-311KonferenzZugriff:
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In: 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203), 2001, S. 117-120KonferenzZugriff:
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In: 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203), 2001, S. 301-304KonferenzZugriff:
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In: Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729), 2004, S. 202-240KonferenzZugriff:
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In: International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138), 2000, S. 789-792KonferenzZugriff:
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In: Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003, 2003, S. 63-68KonferenzZugriff:
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In: Digest. International Electron Devices Meeting, 2002, S. 583-586KonferenzZugriff:
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In: International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217), 1998, S. 149-152KonferenzZugriff: