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Weniger Treffer
Gefunden in
Schlagwort
- law 215 Treffer
- law.invention 215 Treffer
- laser 196 Treffer
- extreme ultraviolet 180 Treffer
- materials science 173 Treffer
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45 weitere Werte:
- plasma 140 Treffer
- optoelectronics 131 Treffer
- lithography 106 Treffer
- energy conversion efficiency 81 Treffer
- chemistry 68 Treffer
- chemistry.chemical_element 60 Treffer
- physics 50 Treffer
- radiation 48 Treffer
- wavelength 37 Treffer
- photolithography 33 Treffer
- tin 29 Treffer
- power (physics) 28 Treffer
- 01 natural sciences 27 Treffer
- laser power scaling 27 Treffer
- 0103 physical sciences 26 Treffer
- next-generation lithography 26 Treffer
- amplifier 23 Treffer
- engineering 23 Treffer
- xenon 23 Treffer
- atomic and molecular physics, and optics 22 Treffer
- condensed matter physics 22 Treffer
- metrology 22 Treffer
- 02 engineering and technology 20 Treffer
- 0210 nano-technology 19 Treffer
- 021001 nanoscience & nanotechnology 19 Treffer
- computer science 18 Treffer
- electrical and electronic engineering 18 Treffer
- brightness 17 Treffer
- light source 17 Treffer
- resist 17 Treffer
- electronic, optical and magnetic materials 15 Treffer
- irradiation 15 Treffer
- photon 15 Treffer
- semiconductor 15 Treffer
- pulse duration 14 Treffer
- 010309 optics 12 Treffer
- physics::space physics 12 Treffer
- ion 11 Treffer
- scanner 11 Treffer
- wafer 11 Treffer
- 010302 applied physics 10 Treffer
- co2 laser 10 Treffer
- general physics and astronomy 10 Treffer
- high volume manufacturing 9 Treffer
- optical coating 9 Treffer
Verlag
- spie 184 Treffer
- ieee 12 Treffer
- aip publishing 11 Treffer
- elsevier bv 9 Treffer
- spie-intl soc optical eng 7 Treffer
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26 weitere Werte:
- laser society of japan 6 Treffer
- osa 4 Treffer
- hindawi limited 3 Treffer
- technical association of photopolymers, japan 3 Treffer
- aip 2 Treffer
- hal ccsd 2 Treffer
- institute of electrical engineers of japan (iee japan) 2 Treffer
- intech 2 Treffer
- iop publishing 2 Treffer
- springer international publishing 2 Treffer
- springer science and business media llc 2 Treffer
- the electrochemical society 2 Treffer
- the optical society 2 Treffer
- acta physica sinica, chinese physical society and institute of physics, chinese academy of sciences 1 Treffer
- american vacuum society 1 Treffer
- defense technical information center 1 Treffer
- hindawi publishing corporation 1 Treffer
- informa uk limited 1 Treffer
- institute of electrical and electronics engineers inc. 1 Treffer
- japan society of plasma science and nuclear fusion research 1 Treffer
- laser institute of america 1 Treffer
- office of scientific and technical information (osti) 1 Treffer
- scientific research publishing, inc. 1 Treffer
- shanghai institute of optics and fine mechanics 1 Treffer
- spie, the international society for optical engineering, bellingham, wa 1 Treffer
- walter de gruyter gmbh 1 Treffer
Publikation
- spie proceedings 107 Treffer
- journal of micro/nanolithography, mems, and moems 7 Treffer
- the review of laser engineering 6 Treffer
- extreme ultraviolet (euv) lithography iv 5 Treffer
- journal of applied physics 5 Treffer
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45 weitere Werte:
- international conference on extreme ultraviolet lithography 2017 4 Treffer
- international conference on extreme ultraviolet lithography 2018 4 Treffer
- microelectronic engineering 4 Treffer
- physics of plasmas 4 Treffer
- 2011 abstracts ieee international conference on plasma science 3 Treffer
- emerging lithographic technologies vi 3 Treffer
- extreme ultraviolet (euv) lithography vii 3 Treffer
- high-power laser ablation v 3 Treffer
- journal of photopolymer science and technology 3 Treffer
- optics letters 3 Treffer
- 2007 digest of papers microprocesses and nanotechnology 2 Treffer
- aip conference proceedings 2 Treffer
- alternative lithographic technologies 2 Treffer
- conference on lasers and electro-optics 2 Treffer
- ecs transactions 2 Treffer
- extreme ultraviolet (euv) lithography x 2 Treffer
- extreme ultraviolet (euv) lithography xii 2 Treffer
- extreme ultraviolet lithography 2020 2 Treffer
- fourth international symposium on laser precision microfabrication 2 Treffer
- laser and particle beams 2 Treffer
- measurement science and technology 2 Treffer
- (cleo). conference on lasers and electro-optics, 2005. 1 Treffer
- 19th polish-slovak-czech optical conference on wave and quantum aspects of contemporary optics 1 Treffer
- 2007 16th ieee international pulsed power conference 1 Treffer
- 2007 ieee 34th international conference on plasma science (icops) 1 Treffer
- 2018 china semiconductor technology international conference (cstic) 1 Treffer
- 21st czech-polish-slovak optical conference on wave and quantum aspects of contemporary optics 1 Treffer
- acta physica sinica 1 Treffer
- advanced optical technologies 1 Treffer
- advances in optical thin films iii 1 Treffer
- aip advances 1 Treffer
- applied physics b 1 Treffer
- applied physics letters 1 Treffer
- applied surface science 1 Treffer
- chinese journal of optics and applied optics 1 Treffer
- cleo: 2013 1 Treffer
- conference on lasers and electro-optics/quantum electronics and laser science conference and photonic applications systems technologies 1 Treffer
- conference record of the 2006 twenty-seventh international power modulator symposium 1 Treffer
- extreme ultraviolet (euv) lithography ix 1 Treffer
- extreme ultraviolet (euv) lithography xi 1 Treffer
- ieej transactions on electronics, information and systems 1 Treffer
- ieej transactions on fundamentals and materials 1 Treffer
- international conference on extreme ultraviolet lithography 2019 1 Treffer
- international conference on extreme ultraviolet lithography 2021 1 Treffer
- international congress on applications of lasers & electro-optics 1 Treffer
Sprache
276 Treffer
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In: Journal of Photopolymer Science and Technology, Jg. 33 (2020-07-01), S. 37-44Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2021, 2021-09-28Online unknownZugriff:
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In: Extreme Ultraviolet (EUV) Lithography XII, 2021-02-23Online unknownZugriff:
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In: Extreme Ultraviolet Lithography 2020, 2020-09-20Online unknownZugriff:
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In: Journal of Photopolymer Science and Technology, Jg. 32 (2019-06-24), S. 77-86Online unknownZugriff:
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In: Extreme Ultraviolet Lithography 2020, 2020-09-21Online unknownZugriff:
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In: Extreme Ultraviolet (EUV) Lithography XI, 2020-03-23Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2019, 2019-09-26Online unknownZugriff:
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In: Extreme Ultraviolet (EUV) Lithography X, 2019-06-06Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2018, 2018-10-03Online unknownZugriff:
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In: Extreme Ultraviolet (EUV) Lithography X, 2019-03-26Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2018, 2018-10-03Online unknownZugriff:
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In: Sensors and Actuators A: Physical, Jg. 231 (2015-07-01), S. 59-64Online unknownZugriff:
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In: 2018 China Semiconductor Technology International Conference (CSTIC), 2018-03-01Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2017, 2017-10-16Online unknownZugriff:
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In: Extreme Ultraviolet (EUV) Lithography VIII, 2017-05-05Online unknownZugriff:
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In: SPIE Proceedings, 2017-01-13Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2017, 2017-10-16Online unknownZugriff:
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In: International Conference on Extreme Ultraviolet Lithography 2017, 2017-10-16Online unknownZugriff: