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Weniger Treffer
Gefunden in
Art der Quelle
Schlagwort
- electronique des semiconducteurs. microelectronique. optoelectronique. dispositifs a l'etat solide 44 Treffer
- semiconductor electronics. microelectronics. optoelectronics. solid state devices 44 Treffer
- fabrication microelectronique (technologie des materiaux et des surfaces) 42 Treffer
- microelectronic fabrication (materials and surfaces technology) 42 Treffer
- interconexion 41 Treffer
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45 weitere Werte:
- interconnection 41 Treffer
- chemical mechanical polishing 40 Treffer
- polissage mecanochimique 36 Treffer
- fabricacion microelectrica 33 Treffer
- fabrication microelectronique 33 Treffer
- microelectronic fabrication 33 Treffer
- integrated circuits 25 Treffer
- circuit integre 24 Treffer
- circuits integres 24 Treffer
- conception. technologies. analyse fonctionnement. essais 24 Treffer
- design. technologies. operation analysis. testing 24 Treffer
- circuito integrado 23 Treffer
- copper 23 Treffer
- integrated circuit 23 Treffer
- cuivre 21 Treffer
- metalizacion 19 Treffer
- metallisation 19 Treffer
- metallizing 19 Treffer
- cu 18 Treffer
- cobre 15 Treffer
- chemical polishing 13 Treffer
- condensed state physics 13 Treffer
- cristallographie cristallogenese 13 Treffer
- crystallography 13 Treffer
- mechanical polishing 13 Treffer
- physics 13 Treffer
- physique 13 Treffer
- physique de l'etat condense 13 Treffer
- polissage chimique 13 Treffer
- polissage mecanique 13 Treffer
- experimental result 12 Treffer
- resultado experimental 12 Treffer
- resultat experimental 12 Treffer
- cross-disciplinary physics: materials science; rheology 11 Treffer
- domaines interdisciplinaires: science des materiaux; rheologie 11 Treffer
- materials science 11 Treffer
- polishing 11 Treffer
- science des materiaux 11 Treffer
- surface treatments 11 Treffer
- traitements de surface 11 Treffer
- adherence 10 Treffer
- adhesion 10 Treffer
- etude experimentale 10 Treffer
- experimental study 10 Treffer
- materiau poreux 10 Treffer
Publikation
- microelectronic engineering 36 Treffer
- thin solid films 9 Treffer
- materials for advanced metallization mam'99 6 Treffer
- applied surface science 4 Treffer
- proceedings of the ninth european workshop on materials for advanced metallization 2005, 6-9 march 2005, dresden, germany 4 Treffer
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12 weitere Werte:
- proceedings of the european workshop on materials for advanced metallization 2002, vaals, the netherlands, march 3-6, 2002 3 Treffer
- proceedings of the international conference on materials for advanced technologies (icmat 2003), symposium l: advances in materials for si microelectronics-from processing to packaging 3 Treffer
- materials for advanced metallization, mam 2003: proceedings of the european workshop on materials for advanced metallization 2003, la londe les maures, france, march 9-12, 2003 2 Treffer
- materials for advanced metallization, mam 2004. proceedings of the european workshop on materials for advanced metallization 2004, brussels, belgium, march 7-10, 2004 2 Treffer
- proceedings of the 30th international conference on metallurgical coatings and thin films, san diego, california, april 28-may 2, 2003 2 Treffer
- secondary ion mass spectrometry sims xiii: proceedings of the thirteenth international conference on secondary ion mass spectrometry and related topics nara-ken new public hall, nara, japan, november 11-16, 2001 2 Treffer
- infos 2007: proceedings of the 15th biennial conference on insulating films on semiconductors, june 20-23, 2007, glyfada athens, greece 1 Treffer
- iscsi-4: proceedings of the fourth international symposium on the control of semiconductor interfaces, karuizawa, japan, october 21-25, 2002 1 Treffer
- proceedings of the 29th conference on micro and nano engineering, september 22-25, 2003, cambridge, united kingdom 1 Treffer
- proceedings of the 31st international conference on metallurgical coatings and thin films, san diego, california, april 19-23, 2004 1 Treffer
- proceedings of the e-mrs 2005 spring meeting symposium p: current trends in optical and x-ray metrology of advanced materials for nanoscale devices, strasbourg, france, may 31-june 3, 2005 1 Treffer
- solid-state electronics 1 Treffer
Sprache
50 Treffer
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2072-2076KonferenzZugriff:
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2218-2224KonferenzZugriff:
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In: ISCSI-4: Proceedings of the Fourth International Symposium on the Control of Semiconductor Interfaces, Karuizawa, Japan, October 21-25, 2002, Jg. 216 (2003), Heft 1-4, S. 46-53KonferenzZugriff:
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In: Secondary Ion Mass Spectrometry SIMS XIII: Proceedings of the Thirteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics Nara-Ken New Public Hall, Jg. 203-04 (2003), S. 473-477KonferenzZugriff:
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In: Proceedings of the ninth european workshop on materials for advanced metallization 2005, 6-9 March 2005, Dresden, Germany, Jg. 82 (2005), Heft 3-4, S. 273-276KonferenzZugriff:
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In: Microelectronic engineering, Jg. 85 (2008), Heft 3, S. 621-624academicJournalZugriff:
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In: Microelectronic engineering, Jg. 83 (2006), Heft 3, S. 506-512academicJournalZugriff:
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In: Microelectronic engineering, Jg. 75 (2004), Heft 3, S. 257-262academicJournalZugriff:
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In: Materials for Advanced Metallization, MAM 2004. Proceedings of the European Workshop on Materials for Advanced Metallization 2004, Brussels, Belgium, March 7-10, Jg. 76 (2004), Heft 1-4, S. 38-45KonferenzZugriff:
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In: Proceedings of the 30th International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 28-May 2, 2003, Jg. 447-48 (2004), S. 524-530KonferenzZugriff:
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In: Materials for Advanced Metallization MAM'99, Jg. 50 (2000), Heft 1-4, S. 291-299KonferenzZugriff:
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In: Secondary Ion Mass Spectrometry SIMS XIII: Proceedings of the Thirteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics Nara-Ken New Public Hall, Jg. 203-04 (2003), S. 470-472KonferenzZugriff:
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In: Materials for Advanced Metallization MAM'99, Jg. 50 (2000), Heft 1-4, S. 403-410KonferenzZugriff:
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In: Microelectronic engineering, Jg. 37-38 (1997), S. 347-352academicJournalZugriff:
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In: Microelectronic engineering, Jg. 37-38 (1997), S. 135-141academicJournalZugriff:
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In: Microelectronic engineering, Jg. 37-38 (1997), S. 285-291academicJournalZugriff:
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In: Proceedings of the 30th International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 28-May 2, 2003, Jg. 447-48 (2004), S. 531-536KonferenzZugriff:
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In: Materials for Advanced Metallization, MAM 2003: Proceedings of the European Workshop on Materials for Advanced Metallization 2003, La Londe Les Maures, France, March 9-12, Jg. 70 (2003), Heft 2-4, S. 293-301KonferenzZugriff:
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In: Microelectronic engineering, Jg. 84 (2007), Heft 1, S. 80-86academicJournalZugriff:
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In: Proceedings of the 29th Conference on Micro and Nano Engineering, September 22-25, 2003, Cambridge, United Kingdom, Jg. 73-74 (2004), S. 474-479KonferenzZugriff: