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Weniger Treffer
Gefunden in
Art der Quelle
Schlagwort
- business 1.251 Treffer
- business.industry 1.251 Treffer
- optoelectronics 942 Treffer
- cmos 920 Treffer
- law 462 Treffer
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45 weitere Werte:
- law.invention 462 Treffer
- electrical engineering 411 Treffer
- electrical and electronic engineering 410 Treffer
- chemistry 367 Treffer
- hardware_integratedcircuits 320 Treffer
- fabrication 318 Treffer
- electronic engineering 314 Treffer
- 02 engineering and technology 287 Treffer
- chemistry.chemical_element 260 Treffer
- 01 natural sciences 237 Treffer
- wafer 233 Treffer
- electronic, optical and magnetic materials 228 Treffer
- hardware_general 227 Treffer
- 0210 nano-technology 212 Treffer
- 021001 nanoscience & nanotechnology 212 Treffer
- surface micromachining 210 Treffer
- hardware_performanceandreliability 206 Treffer
- nanotechnology 205 Treffer
- resonator 204 Treffer
- silicon 203 Treffer
- mechanical engineering 181 Treffer
- condensed matter physics 168 Treffer
- 0103 physical sciences 157 Treffer
- chemistry.chemical_compound 143 Treffer
- capacitive sensing 134 Treffer
- chip 125 Treffer
- 010302 applied physics 121 Treffer
- etching (microfabrication) 119 Treffer
- silicon on insulator 114 Treffer
- instrumentation 112 Treffer
- integrated circuit 106 Treffer
- 0202 electrical engineering, electronic engineering, information engineering 105 Treffer
- voltage 104 Treffer
- electronic circuit 102 Treffer
- capacitance 101 Treffer
- atomic and molecular physics, and optics 97 Treffer
- optics 95 Treffer
- surfaces, coatings and films 91 Treffer
- 0104 chemical sciences 82 Treffer
- cantilever 81 Treffer
- piezoelectricity 81 Treffer
- thin film 78 Treffer
- capacitor 73 Treffer
- computer science::other 73 Treffer
- 010401 analytical chemistry 72 Treffer
Verlag
- ieee 571 Treffer
- institute of electrical and electronics engineers (ieee) 141 Treffer
- spie 128 Treffer
- elsevier bv 107 Treffer
- iop publishing 79 Treffer
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45 weitere Werte:
- springer science and business media llc 53 Treffer
- mdpi ag 34 Treffer
- trans tech publications, ltd. 21 Treffer
- the electrochemical society 18 Treffer
- hal ccsd 13 Treffer
- mdpi 13 Treffer
- wiley 13 Treffer
- spie-intl soc optical eng 11 Treffer
- springer international publishing 10 Treffer
- asmedc 9 Treffer
- institution of engineering and technology (iet) 9 Treffer
- springer berlin heidelberg 8 Treffer
- elsevier 7 Treffer
- institute of electrical engineers of japan (iee japan) 6 Treffer
- multidisciplinary digital publishing institute 6 Treffer
- springer netherlands 6 Treffer
- aip publishing 5 Treffer
- institute of electrical and electronics engineers inc. 5 Treffer
- intech 5 Treffer
- royal society of chemistry (rsc) 5 Treffer
- the japan society of applied physics 5 Treffer
- transducer research foundation, inc. 5 Treffer
- american society of mechanical engineers 4 Treffer
- imaps - international microelectronics assembly and packaging society 4 Treffer
- informa uk limited 4 Treffer
- published by elsevier ltd. 4 Treffer
- springer singapore 4 Treffer
- springer us 4 Treffer
- aip publishing llc 3 Treffer
- emerald 3 Treffer
- escholarship, university of california 3 Treffer
- ieee institute of electrical and electronic engineers 3 Treffer
- john wiley & sons, inc. 3 Treffer
- office of scientific and technical information (osti) 3 Treffer
- the international society for optics and photonics 3 Treffer
- transducer research foundation 3 Treffer
- acoustical society of america (asa) 2 Treffer
- american chemical society (acs) 2 Treffer
- aperta 2 Treffer
- arxiv 2 Treffer
- crc press 2 Treffer
- defense technical information center 2 Treffer
- hindawi limited 2 Treffer
- institute of electronics, information and communications engineers (ieice) 2 Treffer
- public library of science 2 Treffer
Publikation
- spie proceedings 87 Treffer
- journal of microelectromechanical systems 55 Treffer
- journal of micromechanics and microengineering 43 Treffer
- sensors and actuators a: physical 35 Treffer
- microelectronic engineering 27 Treffer
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45 weitere Werte:
- mrs proceedings 22 Treffer
- ieee sensors journal 20 Treffer
- japanese journal of applied physics 19 Treffer
- micromachines 18 Treffer
- microsystem technologies 16 Treffer
- 2011 16th international solid-state sensors, actuators and microsystems conference 13 Treffer
- sensors 13 Treffer
- ecs transactions 12 Treffer
- procedia engineering 12 Treffer
- transducers 2007 - 2007 international solid-state sensors, actuators and microsystems conference 12 Treffer
- ieee electron device letters 11 Treffer
- 2017 19th international conference on solid-state sensors, actuators and microsystems (transducers) 10 Treffer
- ieee transactions on electron devices 10 Treffer
- transducers 2009 - 2009 international solid-state sensors, actuators and microsystems conference 10 Treffer
- 2019 20th international conference on solid-state sensors, actuators and microsystems & eurosensors xxxiii (transducers & eurosensors xxxiii) 9 Treffer
- 2009 ieee 22nd international conference on micro electro mechanical systems 8 Treffer
- journal of micro/nanolithography, mems, and moems 8 Treffer
- key engineering materials 8 Treffer
- sensors (basel, switzerland) 8 Treffer
- sensors and actuators b: chemical 8 Treffer
- 2013 transducers & eurosensors xxvii: the 17th international conference on solid-state sensors, actuators and microsystems (transducers & eurosensors xxvii) 7 Treffer
- 2015 28th ieee international conference on micro electro mechanical systems (mems) 7 Treffer
- proceedings 7 Treffer
- 2007 ieee international electron devices meeting 6 Treffer
- 2011 6th ieee international conference on nano/micro engineered and molecular systems 6 Treffer
- 2011 ieee 24th international conference on micro electro mechanical systems 6 Treffer
- electronics letters 6 Treffer
- ieej transactions on sensors and micromachines 6 Treffer
- 2006 1st ieee international conference on nano/micro engineered and molecular systems 5 Treffer
- 2012 ieee 25th international conference on micro electro mechanical systems (mems) 5 Treffer
- 2018 ieee micro electro mechanical systems (mems) 5 Treffer
- advanced materials research 5 Treffer
- ieee transactions on circuits and systems i: regular papers 5 Treffer
- microelectronics journal 5 Treffer
- 2007 ieee 20th international conference on micro electro mechanical systems (mems) 4 Treffer
- 2008 ieee 21st international conference on micro electro mechanical systems 4 Treffer
- 2011 ieee sensors proceedings 4 Treffer
- 2012 ieee sensors 4 Treffer
- 2015 transducers - 2015 18th international conference on solid-state sensors, actuators and microsystems (transducers) 4 Treffer
- 2020 ieee 33rd international conference on micro electro mechanical systems (mems) 4 Treffer
- 2021 21st international conference on solid-state sensors, actuators and microsystems (transducers) 4 Treffer
- 2021 ieee 34th international conference on micro electro mechanical systems (mems) 4 Treffer
- eurosensors 2018 4 Treffer
- ieee transactions on components, packaging and manufacturing technology 4 Treffer
- plos one 2 Treffer
Sprache
1.513 Treffer
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In: IEEE Transactions on Circuits and Systems I: Regular Papers, Jg. 69 (2022), S. 75-87Online unknownZugriff:
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In: Micro and Nano Systems Letters, Jg. 9 (2021-11-01), Heft 1, S. 1-7Online unknownZugriff:
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In: IEEE Electron Device Letters, Jg. 42 (2021-07-01), S. 1045-1048Online unknownZugriff:
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In: Microsystem Technologies, Jg. 27 (2021-04-26), S. 2543-2552Online unknownZugriff:
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In: IEEE Sensors Journal, Jg. 21 (2021-05-01), S. 10465-10472Online unknownZugriff:
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In: IEEE Transactions on Instrumentation and Measurement, Jg. 70 (2021), S. 1-9Online unknownZugriff:
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In: 3D and Circuit Integration of MEMS, 2021-04-23, S. 131-220Online unknownZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 29 (2020-10-01), S. 1199-1207Online unknownZugriff:
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Pressure Sensor Systems for Wide Pressure Ranges Integrated by a Combined CMOS- and MEMS- TechnologyIn: Journal of Integrated Circuits and Systems, Jg. 8 (2020-12-28), S. 83-88Online unknownZugriff:
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In: Journal of Integrated Circuits and Systems, Jg. 2 (2020-11-18), S. 74-80Online unknownZugriff:
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In: ECS Transactions, Jg. 97 (2020-04-24), S. 79-90Online unknownZugriff:
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In: IEEE Transactions on Nanotechnology, Jg. 19 (2020), S. 113-122Online unknownZugriff:
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In: Micromachines, Jg. 12 (2021-11-01), Heft 1481Online unknownZugriff:
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In: 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D), 2021-10-05Online unknownZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 28 (2019-10-01), S. 744-754Online unknownZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 28 (2019-10-01), S. 755-765Online unknownZugriff:
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In: Journal of Microelectromechanical Systems, Jg. 28 (2019-08-01), S. 656-665Online unknownZugriff:
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In: Scientific reports, Jg. 12 (2021-09-16), Heft 1Online unknownZugriff:
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In: 2021 22nd International Conference on Electronic Packaging Technology (ICEPT), 2021-09-14Online unknownZugriff:
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In: Lab on a chip, Jg. 21 (2021-07-22), Heft 17Online unknownZugriff: