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In: Proceedings of the 32nd International Conference on Micro- and Nano-Engineering, Barcelona, 17-20 September 2006, Jg. 84 (2007), Heft 5-8, S. 1033-1036KonferenzZugriff:
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In: Microelectronic engineering, Jg. 86 (2009), Heft 12, S. 2408-2411academicJournalZugriff: