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- 01 natural sciences 100 Treffer
- 02 engineering and technology 99 Treffer
- 0103 physical sciences 97 Treffer
- materials science 93 Treffer
- 0210 nano-technology 92 Treffer
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45 weitere Werte:
- 021001 nanoscience & nanotechnology 92 Treffer
- computingmilieux_miscellaneous 80 Treffer
- law 62 Treffer
- law.invention 62 Treffer
- optoelectronics 50 Treffer
- 010309 optics 49 Treffer
- 010302 applied physics 46 Treffer
- atomic and molecular physics, and optics 38 Treffer
- condensed matter physics 35 Treffer
- electronic, optical and magnetic materials 34 Treffer
- electrical and electronic engineering 33 Treffer
- resist 32 Treffer
- [spi.nano]engineering sciences [physics]/micro and nanotechnologies/microelectronics 30 Treffer
- physics::optics 30 Treffer
- chemistry 24 Treffer
- lithography 24 Treffer
- physics 22 Treffer
- surfaces, coatings and films 22 Treffer
- [phys]physics [physics] 19 Treffer
- photolithography 19 Treffer
- chemistry.chemical_element 16 Treffer
- extreme ultraviolet lithography 16 Treffer
- [spi.opti]engineering sciences [physics]/optics / photonic 15 Treffer
- electron-beam lithography 15 Treffer
- photonic crystal 15 Treffer
- silicon 15 Treffer
- physics and astronomy (miscellaneous) 14 Treffer
- laser 13 Treffer
- nanoimprint lithography 13 Treffer
- extreme ultraviolet 12 Treffer
- general physics and astronomy 12 Treffer
- etching (microfabrication) 11 Treffer
- refractive index 11 Treffer
- wavelength 11 Treffer
- [phys.phys.phys-optics]physics [physics]/physics [physics]/optics [physics.optics] 10 Treffer
- computer science 10 Treffer
- fabrication 10 Treffer
- metrology 10 Treffer
- photoresist 10 Treffer
- [phys.cond.cm-ms]physics [physics]/condensed matter [cond-mat]/materials science [cond-mat.mtrl-sci] 8 Treffer
- 0202 electrical engineering, electronic engineering, information engineering 8 Treffer
- diffraction 8 Treffer
- engineering 8 Treffer
- near and far field 8 Treffer
- photonics 8 Treffer
Verlag
- hal ccsd 86 Treffer
- spie 16 Treffer
- elsevier bv 6 Treffer
- iop publishing 4 Treffer
- aip publishing 2 Treffer
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12 weitere Werte:
- american vacuum society 2 Treffer
- ieee 2 Treffer
- osa 2 Treffer
- the optical society 2 Treffer
- aip 1 Treffer
- amer physical soc 1 Treffer
- american geophysical union (agu) 1 Treffer
- american physical society (aps) 1 Treffer
- japan soc. appl. phys 1 Treffer
- pergamon-elsevier science ltd 1 Treffer
- trans tech publications, ltd. 1 Treffer
- wiley 1 Treffer
Publikation
- spie proceedings 13 Treffer
- optics express 5 Treffer
- vision research 4 Treffer
- japanese journal of applied physics 2 Treffer
- journal of vacuum science & technology b: microelectronics and nanometer structures 2 Treffer
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20 weitere Werte:
- microelectronic engineering 2 Treffer
- 2006 international conference on transparent optical networks 1 Treffer
- advances in resist materials and processing technology xxv 1 Treffer
- aip conference proceedings 1 Treffer
- applied optics 1 Treffer
- applied physics letters 1 Treffer
- conference on lasers and electro-optics 2010 1 Treffer
- digest of papers. microprocesses and nanotechnology 2001. 2001 international microprocesses and nanotechnology conference (ieee cat. no.01ex468) 1 Treffer
- journal of physics c: solid state physics 1 Treffer
- leos 1991 summer topical meetings on spaceborne photonics: aerospace applications of lasers and electro-optics, optical millimeter-wave interactions: measurements, generation, transmission and control 1 Treffer
- micro-optics 2008 1 Treffer
- optical micro- and nanometrology v 1 Treffer
- photorefractive effects, materials, and devices 1 Treffer
- physical review b 1 Treffer
- physics letters a 1 Treffer
- radiography 1 Treffer
- semiconductor science and technology 1 Treffer
- solid state phenomena 1 Treffer
- tribology international 1 Treffer
- water resources research 1 Treffer
Sprache
141 Treffer
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In: LEOS 1991 Summer Topical Meetings on Spaceborne Photonics: Aerospace Applications of Lasers and Electro-Optics, Optical Millimeter-Wave Interactions: Measurements, Generation, Transmission and Control, 2005-08-24Online unknownZugriff:
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In: Physics Letters A, Jg. 380 (2016-10-01), S. 3524-3529Online unknownZugriff:
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In: Physical Review B, Jg. 93 (2016-03-17)Online unknownZugriff:
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In: Tribology International, Jg. 42 (2009-05-01), S. 609-614Online unknownZugriff:
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In: Optics express, Jg. 22 (2015-01-22), Heft 26Online unknownZugriff:
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In: SPIE Proceedings, 2014-02-19Online unknownZugriff:
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In: Water Resources Research, Jg. 37 (2001-07-01), S. 1859-1868Online unknownZugriff:
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In: Applied Optics, Jg. 55 (2016-04-19), S. 3323-3323Online unknownZugriff:
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In: SPIE Proceedings, 2010-07-22Online unknownZugriff:
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In: Advances in Resist Materials and Processing Technology XXV, 2008-03-14Online unknownZugriff:
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2007Online unknownZugriff: