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Schlagwort
- 8540l 1 Treffer
- applied sciences 1 Treffer
- article synthese 1 Treffer
- capacitor 1 Treffer
- chimie generale, chimie physique 1 Treffer
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45 weitere Werte:
- condensed matter: structure, mechanical and thermal properties 1 Treffer
- constante dielectrique 1 Treffer
- copper 1 Treffer
- couches minces dielectriques 1 Treffer
- cristallisation 1 Treffer
- cross-disciplinary physics: materials science; rheology 1 Treffer
- crystallization 1 Treffer
- cuivre 1 Treffer
- delaminage 1 Treffer
- delamination 1 Treffer
- dielectric 1 Treffer
- dielectric materials 1 Treffer
- dielectric thin films 1 Treffer
- dielectrico baja constante dielectrica 1 Treffer
- dielectrics, piezoelectrics, and ferroelectrics and their properties 1 Treffer
- dielectrique basse permittivite 1 Treffer
- diffusion 1 Treffer
- diffusion(transport) 1 Treffer
- domaines interdisciplinaires: science des materiaux; rheologie 1 Treffer
- effet contrainte 1 Treffer
- electronics 1 Treffer
- electronique 1 Treffer
- electronique des semiconducteurs. microelectronique. optoelectronique. dispositifs a l'etat solide 1 Treffer
- etat condense: structure, proprietes mecaniques et thermiques 1 Treffer
- etching 1 Treffer
- etude experimentale 1 Treffer
- experimental study 1 Treffer
- fabrication microelectronique (technologie des materiaux et des surfaces) 1 Treffer
- gate stack 1 Treffer
- general chemistry, physical chemistry 1 Treffer
- gravure 1 Treffer
- high-k 1 Treffer
- interconnections 1 Treffer
- interconnexion 1 Treffer
- interface 1 Treffer
- interfaces 1 Treffer
- low k dielectric 1 Treffer
- materiau dielectrique 1 Treffer
- metal transition 1 Treffer
- metallurgie, soudage 1 Treffer
- metallurgy, welding 1 Treffer
- microelectronic fabrication (materials and surfaces technology) 1 Treffer
- microscopie electronique balayage 1 Treffer
- mim capacitor 1 Treffer
- mim structures 1 Treffer
Publikation
- applied surface science 1 Treffer
- proceedings of the international conference on materials for advanced technologies (icmat 2005) symposium h: silicon microelectronics: processing to packaging, singapore, july 3-8, 2005 1 Treffer
- secondary ion mass spectrometry sims xiv: proceedings of the fourteenth international conference on secondary ion mass spectrometry and related topics, san diego, california, usa, september 14-19, 2003 1 Treffer
- thin solid films 1 Treffer
Sprache
2 Treffer
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In: Secondary ion mass spectrometry SIMS XIV: Proceedings of the Fourteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics, San Diego, California, USA, September 14-19, 2003, Jg. 231-32 (2004), S. 543-551KonferenzZugriff:
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In: Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon microelectronics: processing to packaging, Singapore, July 3-8, Jg. 504 (2006), Heft 1-2, S. 257-260KonferenzZugriff: