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Weniger Treffer
Gefunden in
Art der Quelle
Schlagwort
- fabrication microelectronique (technologie des materiaux et des surfaces) 561 Treffer
- microelectronic fabrication (materials and surfaces technology) 561 Treffer
- fabrication microelectronique 492 Treffer
- fabricacion microelectrica 491 Treffer
- microelectronic fabrication 491 Treffer
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45 weitere Werte:
- chemical mechanical polishing 408 Treffer
- polissage mecanochimique 381 Treffer
- integrated circuits 254 Treffer
- circuits integres 252 Treffer
- physics 226 Treffer
- physique 226 Treffer
- conception. technologies. analyse fonctionnement. essais 225 Treffer
- design. technologies. operation analysis. testing 225 Treffer
- circuit integre 206 Treffer
- circuito integrado 201 Treffer
- integrated circuit 201 Treffer
- polissage mecanique 172 Treffer
- mechanical polishing 171 Treffer
- pastille electronique 171 Treffer
- polissage chimique 163 Treffer
- chemical polishing 162 Treffer
- pastilla electronica 157 Treffer
- wafer 157 Treffer
- pulido mecanico 156 Treffer
- planarization 154 Treffer
- planarisation 151 Treffer
- pulido quimico 149 Treffer
- evaluation performance 133 Treffer
- interconnexion 133 Treffer
- performance evaluation 133 Treffer
- planarizacion 131 Treffer
- evaluacion prestacion 127 Treffer
- condensed state physics 126 Treffer
- physique de l'etat condense 126 Treffer
- interconexion 124 Treffer
- interconnection 124 Treffer
- optics 111 Treffer
- optique 111 Treffer
- cristallographie cristallogenese 109 Treffer
- crystallography 109 Treffer
- copper 105 Treffer
- etude experimentale 99 Treffer
- experimental study 99 Treffer
- cuivre 97 Treffer
- telecommunications 97 Treffer
- cobre 84 Treffer
- estudio experimental 82 Treffer
- circuits integres par fonction (dont memoires et processeurs) 72 Treffer
- integrated circuits by function (including memories and processors) 72 Treffer
- chimie generale, chimie physique 71 Treffer
Verlag
- elsevier science 144 Treffer
- institute of electrical and electronics engineers 121 Treffer
- spie 93 Treffer
- elsevier 76 Treffer
- electrochemical society 61 Treffer
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34 weitere Werte:
- ieee 60 Treffer
- springer 19 Treffer
- institute of physics 9 Treffer
- oxford university press 9 Treffer
- pennwell 9 Treffer
- japanese journal of applied physics 6 Treffer
- association for computing machinery 5 Treffer
- cahners 4 Treffer
- institution of engineering and technology 4 Treffer
- ieee computer society 3 Treffer
- institution of electrical engineers 3 Treffer
- international microelectronics and packaging society 3 Treffer
- annual reviews 2 Treffer
- inderscience 2 Treffer
- inderscience publishers 2 Treffer
- maney 2 Treffer
- taylor & francis 2 Treffer
- acm 1 Treffer
- american chemical society 1 Treffer
- american institute of physics 1 Treffer
- american scientific publishers 1 Treffer
- blackwell 1 Treffer
- business center for academic societies 1 Treffer
- engineering sciences society 1 Treffer
- international scientific communications 1 Treffer
- international society for optical engineering 1 Treffer
- nec creative 1 Treffer
- societe francaise du vide 1 Treffer
- society of photo-optical instrumentation engineers 1 Treffer
- taylor and francis 1 Treffer
- technische universitat dresden 1 Treffer
- trans tech publications 1 Treffer
- university of bologna 1 Treffer
- wiley-vch 1 Treffer
Publikation
- microelectronic engineering 139 Treffer
- spie proceedings series 75 Treffer
- ieee transactions on semiconductor manufacturing 61 Treffer
- journal of the electrochemical society 35 Treffer
- proceedings - electrochemical society 25 Treffer
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45 weitere Werte:
- thin solid films 24 Treffer
- journal of electronic materials 17 Treffer
- proceedings of spie, the international society for optical engineering 16 Treffer
- ieee transactions on very large scale integration (vlsi) systems 15 Treffer
- iitc : international interconnect technology conference (san francisco ca, 24-26 may 1999) 15 Treffer
- materials for advanced metallization mam'99 11 Treffer
- issm '99 : international symposium on semiconductor manufacturing conference (santa clara ca, 11-13 october 1999) 10 Treffer
- metrology, inspection, and process control for microlithography xvi (santa clara ca, 4-7 march 2002) 10 Treffer
- solid state technology 9 Treffer
- ieee 2004 international interconnect technology conference (proccedings) 8 Treffer
- proceedings of the ninth european workshop on materials for advanced metallization 2005, 6-9 march 2005, dresden, germany 8 Treffer
- asmc 2002 : advancing the science and technology of semiconductor manufacturing (boston ma, 30 april - 2 may 2002) 7 Treffer
- asmc proceedings 7 Treffer
- cleaning technology in semiconductor device manufacturing viii (orlando fl, october 2003) 7 Treffer
- i.e.e.e. transactions on electron devices 7 Treffer
- ieice transactions on information and systems 6 Treffer
- iumrs-icem2002 6 Treffer
- japanese journal of applied physics 6 Treffer
- journal of micromechanics and microengineering (print) 6 Treffer
- metrology, inspection, and process control for microlithography xiv (santa clara ca, 28 february - 2 march 2000) 6 Treffer
- microelectronics journal 6 Treffer
- 2004 ieee / semi advanced semiconductor manufacturing conference and workshop (boston ma, may 4-6, 2004) 5 Treffer
- ieee transactions on advanced packaging 5 Treffer
- metrology, inspection, and process control for microlithography xv (santa clara ca, 26 february - 1 march 2001 ) 5 Treffer
- metrology, inspection, and process control for microlithography xx (20-23 february 2006, san jose, california, usa) 5 Treffer
- sensors and actuators. a, physical 5 Treffer
- electrochimica acta 4 Treffer
- ieee electron device letters 4 Treffer
- in-line characterization, yield reliability, and failure analyses in microelectronic manufacturing (edinburhg, 19-21 may 1999) 4 Treffer
- journal of parallel and distributed computing (print) 4 Treffer
- lecture notes in computer science 4 Treffer
- materials chemistry and physics 4 Treffer
- materials for advanced metallization, mam 2004. proceedings of the european workshop on materials for advanced metallization 2004, brussels, belgium, march 7-10, 2004 4 Treffer
- microelectronics and reliability 4 Treffer
- multilevel interconnect technology ii (santa clara ca, 23-24 september 1998) 4 Treffer
- proceedings of the international conference on materials for advanced technologies (icmat 2003), symposium l: advances in materials for si microelectronics-from processing to packaging 4 Treffer
- process, equipment, and materials control in integrated circuit manufacturing v (santa clara ca, 22-23 september 1999) 4 Treffer
- semiconductor international 4 Treffer
- symposium on materials and processes for submicron technologies ii 4 Treffer
- wear 4 Treffer
- 2000 icmts 3 Treffer
- 37th international symposium on microarchitecture (4-8 december 2004, portland, oregon, proceedings) 3 Treffer
- applied surface science 3 Treffer
- copper interconnects, new contact metallurgies/structures, and low-k interlevel dielectrics ii (orlando fl, 12-17 october 2003) 3 Treffer
- design, process integration, and characterization for microelectronics (santa clara ca, 6-7 march 2002) 3 Treffer
Sprache
Geographischer Bezug
652 Treffer
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2355-2358KonferenzZugriff:
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2072-2076KonferenzZugriff:
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2218-2224KonferenzZugriff:
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In: Microelectronic engineering, Jg. 83 (2006), Heft 11-12, S. 2213-2217KonferenzZugriff:
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In: Microelectronic engineering, Jg. 114 (2014), S. 98-104academicJournalZugriff:
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In: Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2003), Symposium L: Advances in Materials for Si Microelectronics-From Processing to Packaging, Jg. 462-63 (2004), S. 161-167KonferenzZugriff:
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In: Materials for Advanced Metallization, MAM 2004. Proceedings of the European Workshop on Materials for Advanced Metallization 2004, Brussels, Belgium, March 7-10, Jg. 76 (2004), Heft 1-4, S. 95-99KonferenzZugriff:
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In: Surface modification, Jg. 24 (2003), Heft 3-4, S. 499-515Online KonferenzZugriff:
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In: ISCSI-4: Proceedings of the Fourth International Symposium on the Control of Semiconductor Interfaces, Karuizawa, Japan, October 21-25, 2002, Jg. 216 (2003), Heft 1-4, S. 46-53KonferenzZugriff:
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In: IUMRS-ICEM2002, Jg. 66 (2003), Heft 1-4, S. 463-471KonferenzZugriff:
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In: IUMRS-ICEM2002, Jg. 66 (2003), Heft 1-4, S. 488-495KonferenzZugriff:
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In: IUMRS-ICEM2002, Jg. 66 (2003), Heft 1-4, S. 480-487KonferenzZugriff:
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In: Microelectronic engineering, Jg. 104 (2013), S. 48-57academicJournalZugriff:
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In: IEEE transactions on very large scale integration (VLSI) systems, Jg. 21 (2013), Heft 10, S. 1863-1877Online academicJournalZugriff:
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In: IEEE transactions on semiconductor manufacturing, Jg. 15 (2002), Heft 4, S. 374-382Online KonferenzZugriff:
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In: Microelectronic engineering, Jg. 96 (2012), S. 51-55academicJournalZugriff:
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In: Microelectronic engineering, Jg. 98 (2012), S. 29-33academicJournalZugriff:
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In: Microelectronic engineering, Jg. 91 (2012), S. 159-166academicJournalZugriff:
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In: IUMRS-ICEM2002, Jg. 66 (2003), Heft 1-4, S. 433-437KonferenzZugriff:
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In: Microelectronic engineering, Jg. 111 (2013), S. 21-28academicJournalZugriff: