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In: Journal of Materials Research and Technology, Jg. 11 (2021-03-01), S. 1-18Online unknownZugriff:
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In: Journal of Physics D: Applied Physics, Jg. 44 (2011-01-17), S. 055405-55405Online unknownZugriff:
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In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Jg. 17 (1999-07-01), S. 1221-1225Online unknownZugriff: