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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.science/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff:
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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.science/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff:
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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.science/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff:
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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.science/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff:
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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.science/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff:
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In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; https://hal.archives-ouvertes.fr/hal-03450959 ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, France. pp.407-410, ⟨10.1109/MEMS51782.2021.9375317⟩, 2021Online KonferenzZugriff: