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Weniger Treffer
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Schlagwort
- chemical vapor deposition 203 Treffer
- plasma-enhanced chemical vapor deposition 107 Treffer
- pecvd processes 80 Treffer
- thin films 73 Treffer
- silicon 47 Treffer
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45 weitere Werte:
- diamond thin films 43 Treffer
- carbon 23 Treffer
- silicon films 23 Treffer
- mathematical models 21 Treffer
- inductively coupled plasma 20 Treffer
- radio frequency 20 Treffer
- electromagnetic induction 19 Treffer
- plasma-enhanced chemical vapor deposition equipment 19 Treffer
- microwave plasmas 17 Treffer
- vapor-plating 17 Treffer
- hydrogen 16 Treffer
- plasma (physics) 16 Treffer
- silicon nitride 16 Treffer
- microwaves 15 Treffer
- carbon nanotubes 14 Treffer
- amorphous substances 13 Treffer
- atmospheric pressure 13 Treffer
- diamonds 13 Treffer
- nanostructured materials synthesis 13 Treffer
- plasma etching 13 Treffer
- dielectrics 12 Treffer
- nanostructured materials 12 Treffer
- electric discharges 11 Treffer
- oxygen 11 Treffer
- surfaces (technology) 11 Treffer
- crystallography 10 Treffer
- diamond films 10 Treffer
- electrons 10 Treffer
- ion bombardment 10 Treffer
- nanotubes 10 Treffer
- plasma cvd 10 Treffer
- radio frequency discharges 10 Treffer
- silica films 10 Treffer
- spectrum analysis 10 Treffer
- glow discharges 9 Treffer
- hydrogenation 9 Treffer
- nanoparticles 9 Treffer
- silane 9 Treffer
- surface coatings 9 Treffer
- x-ray photoelectron spectroscopy 9 Treffer
- capacitively coupled plasma 8 Treffer
- electrodes 8 Treffer
- electron distribution 8 Treffer
- hydrogen plasmas 8 Treffer
- nanotechnology 8 Treffer
Verlag
- american institute of physics 174 Treffer
- ieee 38 Treffer
- elsevier b.v. 32 Treffer
- iop publishing 19 Treffer
- elsevier science 9 Treffer
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14 weitere Werte:
- electrochemical society inc. 8 Treffer
- springer science & business media b.v. 5 Treffer
- springer nature 4 Treffer
- american chemical society 3 Treffer
- world scientific publishing company 3 Treffer
- cambridge university press 2 Treffer
- institution of engineering & technology 2 Treffer
- extension media 1 Treffer
- john wiley & sons, inc. 1 Treffer
- national association for surface finishing 1 Treffer
- pennwell corporation 1 Treffer
- reed business information 1 Treffer
- sage publications inc. 1 Treffer
- wiley-blackwell 1 Treffer
Publikation
- journal of applied physics 122 Treffer
- applied physics letters 37 Treffer
- ieee transactions on plasma science 30 Treffer
- vacuum 21 Treffer
- thin solid films 19 Treffer
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30 weitere Werte:
- journal of physics: d applied physics 16 Treffer
- review of scientific instruments 11 Treffer
- journal of the electrochemical society 8 Treffer
- journal of materials science 5 Treffer
- ieee transactions on industry applications 3 Treffer
- journal of materials research 3 Treffer
- surface science spectra 3 Treffer
- iee proceedings -- circuits, devices & systems 2 Treffer
- ieee transactions on electron devices 2 Treffer
- measurement science & technology 2 Treffer
- nanoscale research letters 2 Treffer
- surface review & letters 2 Treffer
- aiche journal 1 Treffer
- environmental science & technology 1 Treffer
- ieee electron device letters 1 Treffer
- ieee transactions on dielectrics & electrical insulation 1 Treffer
- ieee transactions on semiconductor manufacturing 1 Treffer
- international journal of high speed electronics & systems 1 Treffer
- journal of applied polymer science 1 Treffer
- journal of physical chemistry b 1 Treffer
- journal of the american chemical society 1 Treffer
- journal of vacuum science & technology: part a-vacuums, surfaces & films 1 Treffer
- laser focus world 1 Treffer
- plasma chemistry & plasma processing 1 Treffer
- plating & surface finishing 1 Treffer
- semiconductor international 1 Treffer
- semiconductor science & technology 1 Treffer
- solid state technology 1 Treffer
- solid-state electronics 1 Treffer
- surface engineering 1 Treffer
Sprache
306 Treffer
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In: Nanoscale Research Letters, Jg. 9 (2014-12-01), Heft 1, S. 1-6Online academicJournalZugriff:
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In: Vacuum, Jg. 207 (2023), S. N.PAGacademicJournalZugriff:
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In: Surface Science Spectra, Jg. 13 (2006-12-01), Heft 1, S. 81-86academicJournalZugriff:
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In: Vacuum, Jg. 103 (2014-05-01), S. 28-32academicJournalZugriff:
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In: Thin Solid Films, Jg. 475 (2005-03-22), Heft 1/2, S. 198-201academicJournalZugriff:
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In: Thin Solid Films, Jg. 464/465 (2004-10-01), S. 315-318academicJournalZugriff:
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In: Vacuum, Jg. 71 (2003-05-19), Heft 3, S. 349-359academicJournalZugriff:
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Deposition of amorphous hydrogenated carbon films on Si and PMMA by pulsed direct-current plasma CVDIn: Thin Solid Films, Jg. 519 (2011-08-01), Heft 20, S. 6688-6692academicJournalZugriff:
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In: Vacuum, Jg. 72 (2003-10-24), Heft 2, S. 129-134academicJournalZugriff:
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In: Surface Science Spectra, Jg. 20 (2013-12-01), Heft 1, S. 9-16academicJournalZugriff:
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In: Thin Solid Films, Jg. 462/463 (2004-09-01), S. 269-274academicJournalZugriff:
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In: Vacuum, Jg. 100 (2014-02-01), S. 66-70academicJournalZugriff:
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In: Journal of Materials Research, Jg. 27 (2012-05-01), Heft 5, S. 863-867Online academicJournalZugriff:
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In: Thin Solid Films, Jg. 516 (2008-08-01), Heft 19, S. 6616-6621academicJournalZugriff:
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In: Thin Solid Films, Jg. 516 (2008-05-01), Heft 13, S. 4441-4445academicJournalZugriff:
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In: Journal of Materials Science, Jg. 45 (2010-05-15), Heft 10, S. 2780-2787Online academicJournalZugriff:
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In: Solid-State Electronics, Jg. 50 (2006-09-01), Heft 9/10, S. 1510-1514academicJournalZugriff:
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In: Journal of Physics: D Applied Physics, Jg. 36 (2003-12-07), Heft 23, S. 2940-2944Online academicJournalZugriff:
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In: IEEE Transactions on Industry Applications, Jg. 29 (1993-05-01), S. 656-660Online academicJournalZugriff:
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In: IEEE Transactions on Plasma Science, Jg. 30 (2002-02-01), Heft 1, S. 442-449Online academicJournalZugriff: