All-Silicon Technology for High- $Q$ Evanescent Mode Cavity Tunable Resonators and Filters.
In: Journal of Microelectromechanical Systems, Jg. 23 (2014-06-01), Heft 3, S. 727-739
Online
academicJournal
Zugriff:
Titel: |
All-Silicon Technology for High- $Q$ Evanescent Mode Cavity Tunable Resonators and Filters.
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Autor/in / Beteiligte Person: | Arif, Muhammad Shoaib ; Peroulis, Dimitrios |
Link: | |
Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 23 (2014-06-01), Heft 3, S. 727-739 |
Veröffentlichung: | 2014 |
Medientyp: | academicJournal |
ISSN: | 1057-7157 (print) |
DOI: | 10.1109/JMEMS.2013.2281119 |
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