Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration.
In: Journal of Microelectromechanical Systems, Jg. 24 (2015-08-01), Heft 4, S. 1029-1037
Online
academicJournal
Zugriff:
Titel: |
Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration.
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Autor/in / Beteiligte Person: | Elsayed, Mohannad Yomn ; Cicek, Paul-Vahe ; Nabki, Frederic ; El-Gamal, Mourad N. |
Link: | |
Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 24 (2015-08-01), Heft 4, S. 1029-1037 |
Veröffentlichung: | 2015 |
Medientyp: | academicJournal |
ISSN: | 1057-7157 (print) |
DOI: | 10.1109/JMEMS.2014.2375574 |
Sonstiges: |
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