Corrosion Investigations of Ruthenium in Potassium Periodate Solutions Relevant for Chemical Mechanical Polishing.
In: Journal of Electronic Materials, Jg. 45 (2016-08-01), Heft 8, S. 4067-4075
Online
academicJournal
Zugriff:
Titel: |
Corrosion Investigations of Ruthenium in Potassium Periodate Solutions Relevant for Chemical Mechanical Polishing.
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Autor/in / Beteiligte Person: | Cheng, Jie ; Wang, Tongqing ; Pan, Jinshan ; Lu, Xinchun |
Link: | |
Zeitschrift: | Journal of Electronic Materials, Jg. 45 (2016-08-01), Heft 8, S. 4067-4075 |
Veröffentlichung: | 2016 |
Medientyp: | academicJournal |
ISSN: | 0361-5235 (print) |
DOI: | 10.1007/s11664-016-4579-1 |
Sonstiges: |
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