Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer.
In: Microsystem Technologies, Jg. 24 (2018), Heft 1, S. 473-482
Online
academicJournal
Zugriff:
Titel: |
Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer.
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Autor/in / Beteiligte Person: | Ramli, Noor ; Arslan, Tughrul ; Haridas, Nakul ; Zhou, Wei |
Link: | |
Zeitschrift: | Microsystem Technologies, Jg. 24 (2018), Heft 1, S. 473-482 |
Veröffentlichung: | 2018 |
Medientyp: | academicJournal |
ISSN: | 0946-7076 (print) |
DOI: | 10.1007/s00542-017-3371-3 |
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