Sputter-assisted plasma CVD of wide or narrow optical bandgap amorphous CN x :H films using i-C4H10/N2 supermagnetron plasma
In: Thin Solid Films, Jg. 516 (2008-05-01), Heft 13, S. 4441-4445
academicJournal
Zugriff:
Titel: |
Sputter-assisted plasma CVD of wide or narrow optical bandgap amorphous CN x :H films using i-C4H10/N2 supermagnetron plasma
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Autor/in / Beteiligte Person: | Kinoshita, Haruhisa ; Ikuta, Ryo ; Yamaguchi, Tomuo |
Link: | |
Zeitschrift: | Thin Solid Films, Jg. 516 (2008-05-01), Heft 13, S. 4441-4445 |
Veröffentlichung: | 2008 |
Medientyp: | academicJournal |
ISSN: | 0040-6090 (print) |
DOI: | 10.1016/j.tsf.2007.10.017 |
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