Fabrication techniques to realize CMOS-compatible microfluidic microchannels.
In: Journal of Microelectromechanical Systems, Jg. 10 (2001-06-01), Heft 2, S. 286-297
Online
academicJournal
Zugriff:
Titel: |
Fabrication techniques to realize CMOS-compatible microfluidic microchannels.
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Autor/in / Beteiligte Person: | Rasmussen, Angela ; Gaitan, Michael ; Locascio, Laurie E. |
Link: | |
Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 10 (2001-06-01), Heft 2, S. 286-297 |
Veröffentlichung: | 2001 |
Medientyp: | academicJournal |
ISSN: | 1057-7157 (print) |
DOI: | 10.1109/84.925785 |
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