Maximizing performance for higher K gate dielectrics.
In: Journal of Applied Physics, Jg. 104 (2008-12-15), Heft 12, S. 124111-124111
Online
academicJournal
Zugriff:
Titel: |
Maximizing performance for higher K gate dielectrics.
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Autor/in / Beteiligte Person: | Robertson, John |
Link: | |
Zeitschrift: | Journal of Applied Physics, Jg. 104 (2008-12-15), Heft 12, S. 124111-124111 |
Veröffentlichung: | 2008 |
Medientyp: | academicJournal |
ISSN: | 0021-8979 (print) |
DOI: | 10.1063/1.3041628 |
Sonstiges: |
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