A study of CrO vapor decomposition in approximated isothermal RF plasma reactors.
In: Canadian Journal of Chemical Engineering, Jg. 67 (1989-02-01), S. 127-136
academicJournal
Zugriff:
Titel: |
A study of CrO vapor decomposition in approximated isothermal RF plasma reactors.
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Autor/in / Beteiligte Person: | Meubus, P. ; Huczko, A. |
Zeitschrift: | Canadian Journal of Chemical Engineering, Jg. 67 (1989-02-01), S. 127-136 |
Veröffentlichung: | 1989 |
Medientyp: | academicJournal |
ISSN: | 0008-4034 (print) |
DOI: | 10.1002/cjce.5450670118 |
Sonstiges: |
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