Vacuum-calibration apparatus with pressure down to 10-10 Pa.
In: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 28 (2010-09-01), Heft 5, S. 1099-1104
academicJournal
Zugriff:
Titel: |
Vacuum-calibration apparatus with pressure down to 10-10 Pa.
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Autor/in / Beteiligte Person: | Li, Detian ; Guo, Meiru ; Cheng, Yongjun ; Feng, Yan ; Zhang, Dixin |
Link: | |
Zeitschrift: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, Jg. 28 (2010-09-01), Heft 5, S. 1099-1104 |
Veröffentlichung: | 2010 |
Medientyp: | academicJournal |
ISSN: | 0734-2101 (print) |
DOI: | 10.1116/1.3457934 |
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