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Picosecond laser ablation of high-quality micro-grooves on CIGS (CuIn<subscript>(1-x)</subscript>Ga<subscript>2</subscript>Se<subscript>x</subscript>) thin films.
In: Radiation Effects & Defects in Solids: Incorporating Plasma Techniques & Plasma Phenomena, Jg. 175 (2020-07-01), Heft 7/8, S. 627-639
Online
academicJournal
Zugriff:
This paper presents a study of the effects of ablation direction, beam profile and outer environment on the width and morphology of micro-grooves ablated by a 10-ps, 532-nm laser with a changing range of fluences and scan speeds on 600 nm-thick CIGS (CuIn(1-x)Ga2Sex) thin films. Experiments show that rear-side ablation by picosecond laser with a flat top beam in water environment yields a larger groove width than normal front-side ablation with a Gaussian beam in air, which is attributed to different material removal mechanisms, uniform energy distribution and the refraction of laser in water. The heat-affected zone and irregular edges induced by the tearing effect are the main defects of groove morphology associated with front- and rear-side ablation processes, respectively. Our studies indicate that flat top beam ablation, in general, inhibits the over-ablation in the central region, thereby improving the uniformity of grooves, though it does not eliminate the heat-affected zone and irregularity of two edges. The straightness of groove edges is further improved with the flat top beam ablation carried out in a water environment, resulting from the action of the shock wave in water. Hence, the nearly perfect micro-grooves can be fabricated with rear-side flat top beam ablation under water, which are characterized by steep sidewalls, straight edges and intact glass substrate without cracks. [ABSTRACT FROM AUTHOR]
Titel: |
Picosecond laser ablation of high-quality micro-grooves on CIGS (CuIn<subscript>(1-x)</subscript>Ga<subscript>2</subscript>Se<subscript>x</subscript>) thin films.
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Autor/in / Beteiligte Person: | Wang, Wenjun ; Pan, Aifei ; Li, Tianqi ; Li, Rongheng ; Li, BenQ ; Mei, Xuesong |
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Zeitschrift: | Radiation Effects & Defects in Solids: Incorporating Plasma Techniques & Plasma Phenomena, Jg. 175 (2020-07-01), Heft 7/8, S. 627-639 |
Veröffentlichung: | 2020 |
Medientyp: | academicJournal |
ISSN: | 1042-0150 (print) |
DOI: | 10.1080/10420150.2019.1709846 |
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