ВПЛИВ ПАРАМЕТРІВ ПРОЦЕСУ МАГНЕТРОННОГО НАПИЛЕННЯ НА ФАЗОВИЙ СКЛАД І СТРУКТУРУ ПОКРИТТІВ З НІТРИДУ ВУГЛЕЦЮ.
In: Automatic Welding / Avtomatitcheskaia Svarka, 2022-09-01, Heft 9, S. 16-20
academicJournal
Zugriff:
Sputtering of CNx-coatings was carried out using two magnetron devices with titanium and graphite targets in the mixture of Ar/N2 gases. The influence of gas mixture (Ar/N2) composition, pressure (0.35, 1 and 2 Pa) and temperature (100. . .200 °C) on the structure of CNx coatings were investigated. It was found that the structure of the coating has an amorphous disordered graphite-like structure with sp³-, sp²- and sp¹ electron bonds of carbon. The most ordered structure is observed in CNx coatings (the least ID/IG = 1.16 and 1.2), produced at a pressure of 0.35 Pa, the temperature of the specimen is 130 °C, the content of nitrogen is 40 and 58%. The influence of a titanium sublayer and a transition TiCN layer on adhesive properties of CNx coatings was studied. When a titanium sublayer and a transition TiCN layer are used together, the adhesion of the coating to the bases of titanium and Kh18N10Т steel grows at a thickness of coating being 2. . .3 μm. 15 Ref., 2 Tabl., 6 Fig. [ABSTRACT FROM AUTHOR]
| Titel: |
ВПЛИВ ПАРАМЕТРІВ ПРОЦЕСУ МАГНЕТРОННОГО НАПИЛЕННЯ НА ФАЗОВИЙ СКЛАД І СТРУКТУРУ ПОКРИТТІВ З НІТРИДУ ВУГЛЕЦЮ.
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| Autor/in / Beteiligte Person: | Борисов, Ю. С. ; Волос, О. В. ; Вігілянська, Н. В. ; Задоя, В. Г. ; Стрельчук, В. В. |
| Zeitschrift: | Automatic Welding / Avtomatitcheskaia Svarka, 2022-09-01, Heft 9, S. 16-20 |
| Veröffentlichung: | 2022 |
| Medientyp: | academicJournal |
| ISSN: | 0005-111X (print) |
| DOI: | 10.37434/as2022.09.03 |
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