Metrology for Emerging Devices and Materials.
In: AIP Conference Proceedings, Jg. 788 (2005-09-09), Heft 1, S. 650-655
Konferenz
Zugriff:
As silicon CMOS technology approaches its limits, new device structures and computational paradigms will be required to replace and augment standard CMOS devices for ULSI circuits. The extreme sensitivity of the electronic properties of these devices to their nanoscale physical properties defines a significant need for precise metrology. This paper provides an overview of the characterization requirements for these technologies. © 2005 American Institute of Physics [ABSTRACT FROM AUTHOR]
Titel: |
Metrology for Emerging Devices and Materials.
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Autor/in / Beteiligte Person: | Vogel, Eric M. |
Zeitschrift: | AIP Conference Proceedings, Jg. 788 (2005-09-09), Heft 1, S. 650-655 |
Quelle: | 2005, Vol. 788 Issue 1, p650-655. 6p.; Jg. 788 (2005-09-09) 1, S. 650-655 |
Veröffentlichung: | 2005 |
Medientyp: | Konferenz |
ISSN: | 0094-243X (print) |
DOI: | 10.1063/1.2063034 |
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