Effect of the electrode structure on the electrical properties of alkoxide derived ferroelectric thin film
In: Materials Letters, Jg. 64 (2010-08-15), Heft 15, S. 1742-1744
academicJournal
Zugriff:
Abstract: Effect of the thermal expansion coefficient of electrode on the electrical properties in lead zirconate titanate (PZT) with morphotropic phase boundary (Pb(Zr0.53,Ti0.47)O3: MPB) composition film was demonstrated in this paper. The lanthanum nickel oxide (LaNiO3: LNO) and lanthanum strontium cobalt oxide ((La0.5,Sr0.5)CoO3: LSCO) was deposited by chemical solution deposition (CSD) as bottom electrode on Si wafer. Highly (100)-oriented LSCO layers were successfully prepared by CSD on Si wafer using (100)-oriented LNO layers as seeding layer for the crystal orientation control. As a result, (100) and (001) oriented PZT film was also successfully prepared on LSCO/LNO/Si stacking structure. The obtained dielectric and ferroelectric properties changed according to the thermal stress which was influenced by the bottom electrode thickness. [Copyright &y& Elsevier]
| Titel: |
Effect of the electrode structure on the electrical properties of alkoxide derived ferroelectric thin film
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| Autor/in / Beteiligte Person: | Ohno, Tomoya ; Matsuda, Takeshi ; Nukina, Takero ; Sakamoto, Naonori ; Wakiya, Naoki ; Tokuda, Shou ; Suzuki, Hisao |
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| Zeitschrift: | Materials Letters, Jg. 64 (2010-08-15), Heft 15, S. 1742-1744 |
| Veröffentlichung: | 2010 |
| Medientyp: | academicJournal |
| ISSN: | 0167-577X (print) |
| DOI: | 10.1016/j.matlet.2010.04.028 |
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