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The oriented growth of β-Ga 2 O 3 films has triggered extensive interest due to the remarkable and complex anisotropy found in the β-Ga 2 O 3 bulks. Remarkable properties, including stronger solar-blind ultraviolet (SBUV) absorption, better mobility, and higher thermal conductivity, are usually observed along <010> direction as compared to other low-index axes. So far, <010>-oriented β-Ga 2 O 3 film growth has been hindered by the lack of suitable substrates and higher surface energy of the (010) crystal plane. Herein, the first growth of uniquely <010>-oriented β-Ga 2 O 3 films on quartz substrates by laser chemical vapor deposition (LCVD) are reported. By investigating the effects of deposition temperature (T dep ) and O 2 flow rate (R O2 ) on the growth of β-Ga 2 O 3 films, it is found that the formation of <010> orientation is closely related to the higher stability of oxygen close-packed planes under O-rich condition. As a result, a grain size of up to ≈2 µm and a deposition rate of up to ≈ 40 µm h -1 are obtained. Metal-semiconductor-metal (MSM) type detector based on <010>-oriented β-Ga 2 O 3 film exhibits ultra-fast response speed, 1-2 orders of magnitude higher than those of most detectors based on β-Ga 2 O 3 films with other orientations.

Titel:	Laser CVD Growth of Uniquely <010>-oriented β-Ga <subscript>2</subscript> O <subscript>3</subscript> Films on Quartz Substrate with Ultrafast Photoelectric Response.
Autor/in / Beteiligte Person:	Tu, R ; Li, X ; Xu, Q ; Gao, T ; Zhang, X ; Li, BW ; Zhang, S ; Goto, T ; Zhang, L
Link:	Full Text Finder (Volltext)
Zeitschrift:	Small (Weinheim an der Bergstrasse, Germany), Jg. 19 (2023-07-01), Heft 30, S. e2300154
Veröffentlichung:	Weinheim, Germany : Wiley-VCH, c2005-, 2023
Medientyp:	academicJournal
ISSN:	1613-6829 (electronic)
DOI:	10.1002/smll.202300154
Sonstiges:	Nachgewiesen in: MEDLINE Sprachen: English Publication Type: Journal Article Language: English [Small] 2023 Jul; Vol. 19 (30), pp. e2300154. <i>Date of Electronic Publication: </i>2023 Apr 14. References: W. Y. Kong, G. A. Wu, K. Y. Wang, T. F. Zhang, Y. F. Zou, D. D. Wang, L. B. Luo, Adv. Mater. 2016, 28, 10725. ; C. Golz, Z. Galazka, J. Lähnemann, V. Hortelano, F. Hatami, W. T. Masselink, O. Bierwagen, Phys Rev 2019, 3, 124604. ; X. X. Li, G. Zeng, Y. C. Li, Q. J. Yu, M. Y. Liu, L. Y. Zhu, W. J. Liu, Y. G. Yang, D. W. Zhang, H. L. Lu, Nano Res. 2022, 15, 9359. ; X. X. Li, G. Zeng, Y. C. Li, H. Zhang, Z. G. Ji, Y. G. Yang, M. Luo, W. D. Hu, W. D. Zhang, H. L. Lu, npj Flex Electron 2022, 6, 47. ; Y. Pei, L. Liang, X. Wang, Z. Wang, H. B. Zhang, J. Y. Ren, H. T. Cao, J. Phys. Chem. Lett. 2022, 13, 7243. ; D. Kaur, Rakhi, P. V., G. Gupta, S. Sarkar, M. Kumar, Nanotechnology 2022, 33, 375302. ; Y. Qin, S. B. Long, Q. M. He, H. Dong, G. Z. Jian, Y. Zhang, X. H. Hou, P. J. 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Grant Information: 2021B0301030001 Guangdong Major Project of Basic and Applied Basic Research; 2021B0707050001 Key-Area Research and Development Program of Guangdong Province; 2019PT01 Changsha Science and Technology Project; HJL202012A001 Self-innovation Research Funding Project of Hanjiang Laboratory; HJL202012A002 Self-innovation Research Funding Project of Hanjiang Laboratory; HJL202012A003 Self-innovation Research Funding Project of Hanjiang Laboratory; 2019AG029 Major Science and Technology Project in Zhongshan City, Guangdong Province; 6141A02022257 Joint Fund of the Ministry of Education for Pre-research of Equipment; 51861145306 National Natural Science Foundation of China; 51872212 National Natural Science Foundation of China; 51972244 National Natural Science Foundation of China; 52002075 National Natural Science Foundation of China; 62204179 National Natural Science Foundation of China; B13035 National Natural Science Foundation of China; 2018YFE0103600 International Science and Technology Cooperation Programme; 2019AAA030 Technological Innovation of Hubei Province; 2022J05124 Natural Science Foundation of Fujian Province; Chaozhou Ceramic Industry Talent Revitalization Plan-Talent Support Project for Basic Research Platform of Ceramic Material Application Contributed Indexing: Keywords: <010> orientation; laser chemical vapor deposition (CVD); photoresponse; solar-blind ultraviolet; β-Ga2O3 films Entry Date(s): Date Created: 20230415 Latest Revision: 20230726 Update Code: 20240513

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Laser CVD Growth of Uniquely <010>-oriented β-Ga <subscript>2</subscript> O <subscript>3</subscript> Films on Quartz Substrate with Ultrafast Photoelectric Response.