Nonalloy Ohmic contact fabrication in a hydrothermally grown n-ZnO (0001) substrate by KrF excimer laser irradiation.
In: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, Jg. 18 (2000-05-01), Heft 3, S. 1406-1408
academicJournal
Zugriff:
Titel: |
Nonalloy Ohmic contact fabrication in a hydrothermally grown n-ZnO (0001) substrate by KrF excimer laser irradiation.
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Autor/in / Beteiligte Person: | Akane, Toshimitsu ; Sugioka, Koji ; Midorikawa, Katsumi |
Zeitschrift: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, Jg. 18 (2000-05-01), Heft 3, S. 1406-1408 |
Veröffentlichung: | 2000 |
Medientyp: | academicJournal |
ISSN: | 1071-1023 (print) |
DOI: | 10.1116/1.591479 |
Sonstiges: |
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