Surface Structure and Electrical Properties of Solution Processed Lanthanum Nickelate Films.
In: AIP Conference Proceedings; 2014, Vol. 1591, p997-999, 3p, 1 Chart, 3 Graphs; Jg. 1591 (2014-04-24) S. 997-999
Konferenz
Zugriff:
Conducting oxides with perovskite crystal structure have many advantages over the simple Pt or Au, Pt based metal bottom electrodes (BE), particularly in fabrication of ferroelectric as well as resistive random access memory devices, if they possess smooth surface morphology. LaNiO 3 (LNO) thin films were prepared by modified chemical solution deposition method. Precursor solutions were spin coated onto SiO2-substrates. Deposited layers were thermally treated in a pre-heated furnace at 550 °C and oxygenated up to 800 °C. Results of AFM and FESEM showed that films are very smooth (Ra = 1.69 nm), dense, crack-free and with monodispersed nanocrystallites. Growth conditions such as spinning rate, annealing rates and temperatures etc. have been optimized for mono dispersed crystallinity with very smooth surface morphology. Sheet resistivity, carrier concentration and RMS roughness were correlated with growth temperatures. [ABSTRACT FROM AUTHOR]
Copyright of AIP Conference Proceedings is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Titel: |
Surface Structure and Electrical Properties of Solution Processed Lanthanum Nickelate Films.
|
---|---|
Autor/in / Beteiligte Person: | Pandya, Nirav C. ; Joshi, U. S. |
Quelle: | AIP Conference Proceedings; 2014, Vol. 1591, p997-999, 3p, 1 Chart, 3 Graphs; Jg. 1591 (2014-04-24) S. 997-999 |
Veröffentlichung: | 2014 |
Medientyp: | Konferenz |
ISSN: | 0094-243X (print) |
DOI: | 10.1063/1.4872831 |
Schlagwort: |
|
Sonstiges: |
|