The Casimir effect between micromechanical components on a silicon chip
In: 2014 International Conference on Optical MEMS and Nanophotonics, 2014-08-01
Online
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Zugriff:
The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than ~ 10 μm it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.
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The Casimir effect between micromechanical components on a silicon chip
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| Autor/in / Beteiligte Person: | Zou, Jie ; Johnson, Steven G. ; Kravchenko, Ivan I. ; Reid, M. T. H. ; Ho Bun Chan ; Marcet, Z. ; Lu, T. ; McCauley, Alexander P. ; Rodriguez, Alejandro W. ; Bao, Y. |
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| Zeitschrift: | 2014 International Conference on Optical MEMS and Nanophotonics, 2014-08-01 |
| Veröffentlichung: | IEEE, 2014 |
| Medientyp: | unknown |
| DOI: | 10.1109/omn.2014.6924543 |
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