Performance of four-terminal low-temperature polycrystalline-silicon thin-film transistors and their application in CMOS inverters on glass substrates
In: Japanese Journal of Applied Physics, Jg. 57 (2018-01-24), S. 03DB01
Online
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Zugriff:
High-performance and low-power-operation CMOS circuits comprising low-temperature (LT) polycrystalline-silicon (poly-Si) thin-film transistors (TFTs) are indispensable for integrated circuits on glass substrate. The fabrication of high-quality poly-Si films with large grains can enhance the on-current of TFTs on glass substrates owing to low carrier scattering. In this study, we used continuous-wave laser lateral crystallization (CLC) to fabricate high-quality thin poly-Si films on a glass substrate. To achieve low-power operation, precise threshold voltage (V th) control is most important, and four-terminal (4T) TFT is one attractive approach to achieve it. We fabricated a CMOS inverter comprising 4T CLC LT poly-Si TFTs on a glass substrate and confirmed nearly identical controllability of V th, subthreshold swing, and mobility of n- and p-channel TFTs in CMOS inverter as compared with TFTs fabricated on different glass substrates with their own processes. By using the high controllability of 4T CLC LT poly-Si TFTs, we successfully operated the CMOS inverter with V dd = 1.0 V.
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Performance of four-terminal low-temperature polycrystalline-silicon thin-film transistors and their application in CMOS inverters on glass substrates
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Autor/in / Beteiligte Person: | Hara, Akito ; Utsumi, Hiroki ; Ohsawa, Hiroki |
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Zeitschrift: | Japanese Journal of Applied Physics, Jg. 57 (2018-01-24), S. 03DB01 |
Veröffentlichung: | IOP Publishing, 2018 |
Medientyp: | unknown |
ISSN: | 1347-4065 (print) ; 0021-4922 (print) |
DOI: | 10.7567/jjap.57.03db01 |
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