Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr0.52/Ti0.48)O3Thin Film and LaNiO3Oxide Electrode

In the present study, we describe the influence of LaNiO3 (LNO) oxide electrodes on the sensing property of self-sensitive piezoelectric microcantilevers using Pb(Zr0.52/Ti0.48)O3 (PZT) thin films as a sensor and an actuator. Microcantilevers with and without LNO thin films were fabricated through microelectromchanical systems (MEMS) microfabrication process. The transverse piezoelectric constant d31 of the PZT thin films with LNO thin films was determined to be -120 pm/V, while those without LNO thin films was determined to be -80 pm/V. In spite of the higher piezoelectric constant, the sensor output of the self-sensitive cantilevers with LNO thin films is only about 1/5 of those without LNO thin films. The result will be discussed in relation to the dielectric loss of the PZT thin films.