Fabrication of on-wafer MMIC compatible integrated NiCr loads
In: Microelectronic Engineering, 2001-09-01, S. 801-806
Online
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Zugriff:
In this work we report on a novel technique for the fabrication of integrated NiCr resistors on GaAs substrates which are compatible with monolithic millimetre-wave integrated circuits (MMMICs) using e-beam lithography. Integrated NiCr resistors are required extensively for broadband RF on-wafer calibration of a vector network analyser and passive and active microwave components realisation. These loads showed a flat frequency response across an ultra-broadband range from DC to 110 GHz. In order to demonstrate the validity of using these NiCr loads on GaAs for on-wafer calibration, active devices were measured after LRRM calibration using the GaAs NiCr loads and compared with measured data of the same devices after LRL calibration.
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Fabrication of on-wafer MMIC compatible integrated NiCr loads
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Autor/in / Beteiligte Person: | Elgaid, Khaled ; Thayne, Iain G. ; Edgar, D.L. ; Ferguson, S. ; Beaumont, S. P. |
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Zeitschrift: | Microelectronic Engineering, 2001-09-01, S. 801-806 |
Veröffentlichung: | Elsevier BV, 2001 |
Medientyp: | unknown |
ISSN: | 0167-9317 (print) |
DOI: | 10.1016/s0167-9317(01)00504-4 |
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