Multimode digital control of a suspended polysilicon microstructure
In: Journal of Microelectromechanical Systems, Jg. 5 (1996), S. 283-297
Online
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Zugriff:
Digital control of a suspended 350 /spl mu/m/spl times/380 /spl mu/m/spl times/1.6 /spl mu/m-thick surface-micromachined polysilicon plate is demonstrated in three degrees of freedom, with application to multimode accelerometers, vibratory rate gyroscopes, and actively positioned micromirrors. Plate displacement about the 2.2 /spl mu/m nominal position above the substrate is measured with shielded capacitive sensors connected to CMOS buffer circuits fabricated adjacent to the microstructure. Four micromechanical sigma-delta loops are used to control eight electrostatic actuators that drive the plate vertically (z) and in out-of-plane rotation (/spl theta/ and /spl phi/). Resonant frequencies are 2.7 kHz for the /spl theta/ rotational mode and 3.7 kHz for both z and /spl phi/ modes. The system is evaluated using a mixed mechanical/electromechanical/circuit simulation in SPICE. Closed-loop transient simulation of a 150-Hz square-wave position input signal is in good agreement with experimental results. Squeeze-film damping limits the plate slew rate to 0.83 mm/s in air. Position is controlled to within /spl plusmn/25 mm, being limited by quantization noise at the 50 kHz sampling rate.
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Multimode digital control of a suspended polysilicon microstructure
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Autor/in / Beteiligte Person: | Howe, Roger T. ; Fedder, Gary K. |
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Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 5 (1996), S. 283-297 |
Veröffentlichung: | Institute of Electrical and Electronics Engineers (IEEE), 1996 |
Medientyp: | unknown |
ISSN: | 1057-7157 (print) |
DOI: | 10.1109/84.546408 |
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