The impact of diffusion gettering on solar cell efficiency and light induced degradation

In this paper, the influence of an annealing process at 500 °C for 30 min. after emitter diffusion of multi-crystalline solar cells was investigated. Neighboring sister wafers from a silicon ingot were processed using light doped emitter (LDE) and low temperature annealing (LTA). Emitter profiles measured by Electrochemical Capacitance Voltage (ECV) showed that there is no obvious difference between LDE and LTA due to the lower annealing temperature. The lifetime and iron concentration measurement indicated that the gettering of LTA diffusion is much better than LDE. Therefore, the solar cell efficiency of LTA was up to 19.01%, which is 0.28%abs higher than LDE due to the higher open circuit voltage (Voc) and short-circuit current (Isc). The Internal Quantum Efficiency (IQE) measurement with better long wavelength response showed the wafer quality was much improved after LTA diffusion. To further investigate diffusion gettering performance, light-induced-degradation (LID) was analyzed both for LDE and LTA diffusion. The LID of LDE diffusion with 1.15%rel. is obviously higher than LTA diffusion of 0.46%rel., attributing to the higher iron concentration of LDE diffusion emitter to result in higher iron-boron pair dissociation.