Microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3 ferroelectric films on different bottom electrodes
In: Materials Letters, Jg. 58 (2004-11-01), S. 3447-3450
Online
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Zugriff:
The crystalline quality, dielectric and ferroelectricity of the Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) films deposited on the LaNiO 3 (LNO), LNO/Pt and Pt bottom electrodes were comparatively analyzed to investigate the possibility for their application. LNO thin films were successfully prepared on Si (100) and Pt(111)/Ti/SiO 2 /Si substrates by modified metallorganic decomposition (MOD). The PZT thin films were spin-coated onto the LNO, LNO/Pt and Pt bottom electrodes by sol–gel method. The crystallographic orientation and the microstructure of the resulting LNO films and PZT thin films on the different bottom electrodes were characterized by X-ray diffraction analysis. The dielectric and ferroelectric properties of PZT films on the different bottom electrodes are discussed. The PZT films deposited onto Pt/Ti/SiO 2 /Si and LNO/Si substrates show strong (110) and (100) preferred orientation, respectively, while the films deposited onto LNO/Pt/Ti/SiO 2 /Si substrates show the peaks of mixed orientations. PZT films on LNO and LNO/Pt bottom electrodes have larger dielectric constant and remnant polarizations compared with those grown on the Pt electrode.
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Microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3 ferroelectric films on different bottom electrodes
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Autor/in / Beteiligte Person: | Xi, Yao ; Jiankang, Li |
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Zeitschrift: | Materials Letters, Jg. 58 (2004-11-01), S. 3447-3450 |
Veröffentlichung: | Elsevier BV, 2004 |
Medientyp: | unknown |
ISSN: | 0167-577X (print) |
DOI: | 10.1016/j.matlet.2004.03.053 |
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