Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
In: IEEE Access, Jg. 8 (2020), S. 142785-142794
Online
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Zugriff:
This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a $0.13~\mu \text{m}$ complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminum nitride, AlN, squared device with $80~\mu \text{m}$ side that resonates at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise contribution and a clear improvement in the Signal-to Noise ratio (SNR ~ 27 dB better) compared to a non-integrated equivalent system. A pulse-echo experiment with the single PMUT-on-CMOS for transmitting and sensing simultaneously is demonstrated, ensuring a 17.3 dB SNR, higher than the minimal necessary for accurate fingerprint images, paving the way towards a pixel sized imaging system with no need of multiple simultaneous PMUTs transmitters. Consuming only 0.3 mW and getting an input-referred noise of 3.26 mPa/ $\surd $ Hz at 2.4 MHz, the proposed pulse-echo system achieves a competitive noise efficient factor in comparison with the state-of-the-art.
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Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
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Autor/in / Beteiligte Person: | Ledesma, Eyglis ; Uranga, Arantxa ; Zamora, Ivan ; Barniol, Nuria |
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Zeitschrift: | IEEE Access, Jg. 8 (2020), S. 142785-142794 |
Veröffentlichung: | Institute of Electrical and Electronics Engineers (IEEE), 2020 |
Medientyp: | unknown |
ISSN: | 2169-3536 (print) |
DOI: | 10.1109/access.2020.3013763 |
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