<font>BaTiO3</font> THIN FILM BY CSD FROM MOLECULAR-DESIGNED PRECURSOR SOLUTION
In: Functional Materials Letters, 2012-06-01, S. 1260007-1260007
Online
unknown
Zugriff:
BaTiO3 (BT) thin films were deposited by the cost effective method of a chemical solution deposition (CSD). 0.3 M BT precursor solution was prepared by the partial hydrolysis method. Partially hydrolyzed Ti -alkoxide and Ba precursor solution was reacted to prepare the highly polymerized BT precursor solution. BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate with (100)-oriented LaNiO 3 (LNO) thin film electrode. In addition, effect of the pre-annealing at 600°C in O2 atmosphere was elucidated by measuring the electrical properties of the resulting BT thin films deposited by the different annealing process. As a result, molecular-design of the BT precursor and a LNO thin film electrode were effective to enhance the electrical properties of the resultant BT thin films, as well as 600°C pre-annealing.
Titel: |
<font>BaTiO3</font> THIN FILM BY CSD FROM MOLECULAR-DESIGNED PRECURSOR SOLUTION
|
---|---|
Autor/in / Beteiligte Person: | Wakiya, Naoki ; Nagasaka, Masaomi ; Suzuki, Hisao ; Iwasaki, Dai ; Sakamoto, Naonori |
Link: | |
Zeitschrift: | Functional Materials Letters, 2012-06-01, S. 1260007-1260007 |
Veröffentlichung: | World Scientific Pub Co Pte Lt, 2012 |
Medientyp: | unknown |
ISSN: | 1793-7213 (print) ; 1793-6047 (print) |
DOI: | 10.1142/s1793604712600077 |
Schlagwort: |
|
Sonstiges: |
|