A MEMS-CMOS Microsystem for Contact-Less Temperature Measurements
In: IEEE Transactions on Circuits and Systems I: Regular Papers, Jg. 69 (2022), S. 75-87
Online
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Zugriff:
This paper presents a microsystem suitable for contact-less human body temperature measurements, as well as for presence, motion and proximity detection. It consists of a 130-nm CMOS-SOI MEMS (Micro-Electro Mechanical System) thermal sensor, referred to as ``TMOS'', and its 130-nm CMOS interface circuit. The TMOS, based on a micromachined transistor, being an active device, features advantages in terms of internal gain: with optimal biasing, indeed, the TMOS achieves 274-μV/°C input-referred sensitivity at 3-cm distance and 50.33° field-of-view (FOV), outperforming thermopile detectors. The sensor and the interface circuit, featuring a chopper-stabilized-based analog readout with a 12-bit SAR ADC (Successive Approximation Register Analog-to-Digital Converter), were mounted in the same package and extensively measured: the microsystem achieves repeatability and ±0.17°C precision, thus satisfying the requirements for contact-less human body temperature measurements; furthermore, its performance as presence, motion and proximity detector was also verified.
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A MEMS-CMOS Microsystem for Contact-Less Temperature Measurements
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Autor/in / Beteiligte Person: | Nemirovsky, Yael ; Brouk, Igor ; Moisello, Elisabetta ; Vaiana, Michele ; Bruno, Giuseppe ; Malcovati, Piero ; Bonizzoni, Edoardo ; Maria Eloisa Castagna |
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Zeitschrift: | IEEE Transactions on Circuits and Systems I: Regular Papers, Jg. 69 (2022), S. 75-87 |
Veröffentlichung: | Institute of Electrical and Electronics Engineers (IEEE), 2022 |
Medientyp: | unknown |
ISSN: | 1558-0806 (print) ; 1549-8328 (print) |
DOI: | 10.1109/tcsi.2021.3091839 |
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