Time-Of-Flight distance sensor with enhanced dynamic range

A Time-Of-Flight distance measurement sensor is presented. Detection and mixing is done with an in-substrate Current Assisted Photonic Demodulator. Background light suppression and high dynamic range is achieved using a Variable Transimpedance Amplifier. The pixel also comprises sample and hold circuitry and special low pass filters, for in-pixel averaging, with a 10 Hz to 10 kHz tuneable cut-off frequency. Proof-of-principle measurements on a standard Complementary Metal Oxide Semiconductor 0.35 μm prototype measuring 50 μm x 50 μm with a fill factor of 60% are included.