Micromachined switches and phase shifters for transmit/receive module applications

This work presents micro-electromechanical system (MEMS) based switches and phase shifters for transmit/receive module applications. All designs are implemented using coplanar waveguide (CPW) transmission line and fabricated on 635-μm alumina substrate using surface micromachining process. Different switching networks like series/shunt configuration, single-pole-double-throw (SPDT), single-pole-four-throw (SP4T), SP8T, SP9T and SP12T are presented for application in multi-bit digital phase shifters. One configuration of the 5-bit phase shifter demonstrates an average insertion loss of 2.65 dB in the 16.75–17.25 GHz band with a return loss better than 22 dB and average phase error less than 0.680 at 17 GHz. Total area of the fabricated 5-bit phase shifter is 13 mm2.