Stacked-Spiral RF Inductor With Vertical Nano-Powder Magnetic Core in CMOS
In: IEEE Microwave and Wireless Components Letters, Jg. 22 (2012), S. 29-31
Online
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Zugriff:
This letter reports a novel concept of vertical stacked-spiral RF inductor with integrated nano-powder-magnetic-core in standard CMOS. A proof-of-concept design in a foundry 0.18 6-metal CMOS using a new post-CMOS backend process (CMOS+) is depicted. Measurement shows significant improvement in inductance of 35% and quality factor of 41% up to multi-GHz in prototype. An -density of 420 at 1.2 GHz is achieved. Limiting factors for the relatively low factor in the prototypes and improvement method are discussed.
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Stacked-Spiral RF Inductor With Vertical Nano-Powder Magnetic Core in CMOS
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Autor/in / Beteiligte Person: | Yang, Yi ; Liu, Litian ; Wang, Xin ; Yang, Chen ; Ren, Tian-Ling ; Yue, Zhen-Xing ; Yang, Liwu ; Zhan, Jing ; Zhang, Fan ; Wang, Albert |
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Zeitschrift: | IEEE Microwave and Wireless Components Letters, Jg. 22 (2012), S. 29-31 |
Veröffentlichung: | Institute of Electrical and Electronics Engineers (IEEE), 2012 |
Medientyp: | unknown |
ISSN: | 1558-1764 (print) ; 1531-1309 (print) |
DOI: | 10.1109/lmwc.2011.2176474 |
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