A single-crystal Si-resonator with on-chip readout amplifier in standard CMOS
In: Sensors and Actuators A: Physical, Jg. 93 (2001-09-01), S. 163-172
Online
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Zugriff:
The monolithic integration of electronic circuits in standard CMOS technology with high aspect ratio micromechanical structures based on single-crystal silicon is presented. For this technology neither silicon on insulator (SOI) wafers nor wet processes are required. A resonator device is chosen for technology demonstration. The effect of micromachining on parameters of CMOS transistors is detected and the usefulness of a final annealing step is confirmed. A novel electronic circuit design allows signal processing, even for low resonator signal levels and strong parasitic effects.
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A single-crystal Si-resonator with on-chip readout amplifier in standard CMOS
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Autor/in / Beteiligte Person: | Gessner, Thomas ; Höffer, A. ; Stegemann, K. ; Griesbach, K. ; Bertz, Andreas ; Symanzik, H. ; Ebest, G. ; Steiniger, C. |
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Zeitschrift: | Sensors and Actuators A: Physical, Jg. 93 (2001-09-01), S. 163-172 |
Veröffentlichung: | Elsevier BV, 2001 |
Medientyp: | unknown |
ISSN: | 0924-4247 (print) |
DOI: | 10.1016/s0924-4247(01)00650-1 |
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