3-D CMOS Chip Stacking for Security ICs Featuring Backside Buried Metal Power Delivery Networks With Distributed Capacitance
In: IEEE Transactions on Electron Devices, Jg. 68 (2021-04-01), S. 2077-2082
Online
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Zugriff:
3-D stacks of complimentary metal–oxide–semiconductor (CMOS) integrated circuit (IC) chips for security applications monolithically embed backside buried metal (BBM) routing with low series impedance and high decoupling capability in a power delivery network (PDN), thanks to distributed capacitances over a full-chip backside area. The 3-D Si demonstrator integrating cryptographic engines was fabricated in a 0.13- $\mu \text{m}$ CMOS technology with post-Si wafer-level BBM Cu processing with 10, 15, and ${10}~\mu \text{m}$ of thickness, linewidth, and space, respectively, along with through Si vias (TSVs) with 10 and $40~\mu \text{m}$ of diameter and depth, respectively. The capacitance of 0.18 nF/mm2 in the effective backside area of 71 mm2 suppressed dynamic IR drops in 10% and 59% for the single chip and four chip stack samples, respectively, during the operation of a 3.9 M-gate crypto core at 30 MHz. On-chip power noise monitoring (OCM) was applied in these measurements. The 3-D BBM PDN also effectively reduces power side channel information leakage, which is evaluated by $14\times $ increase in the number of externally observed electromagnetic (EM) noise waveforms to attain the ${t}$ -test value of larger than 4.5.
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3-D CMOS Chip Stacking for Security ICs Featuring Backside Buried Metal Power Delivery Networks With Distributed Capacitance
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Autor/in / Beteiligte Person: | Miura, Noriyuki ; Okidono, Takaaki ; Watanabe, Naoya ; Miki, Takuji ; Kikuchi, Katsuya ; Shimamoto, Haruo ; Nagata, Makoto ; Araga, Yuuki ; Sonoda, Hiroki ; Monta, Kazuki |
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Zeitschrift: | IEEE Transactions on Electron Devices, Jg. 68 (2021-04-01), S. 2077-2082 |
Veröffentlichung: | Institute of Electrical and Electronics Engineers (IEEE), 2021 |
Medientyp: | unknown |
ISSN: | 1557-9646 (print) ; 0018-9383 (print) |
DOI: | 10.1109/ted.2021.3058226 |
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